2008
DOI: 10.1143/apex.1.061102
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Room-Temperature Growth of UV-Emitting GaN with a Hexagonal Crystal-Structure Using Photochemical Vapor Deposition

Abstract: The room-temperature (RT) growth of ultraviolet-emitting hexagonal gallium nitride (h-GaN) on a sapphire substrate using photochemical vapor deposition (PCVD) has been demonstrated. A high photoluminescence (PL) peak at 3.47 eV was observed at 5 K, indicating a highquality crystalline structure for h-GaN. A RT PL energy peak of 3.40 eV indicated the reduction of thermal residual stresses in GaN. In addition, the RT growth resulted in the formation of dendrite-like GaN, which originated from the low kinetic ene… Show more

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Cited by 7 publications
(2 citation statements)
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“…(g) XRD θ -2θ scan result of (a) ZnO nanocrystals grown using photochemical vapor deposition (PCVD). PCVD reduces the growth temperature by producing reactive radicals via the photolysis of their precursors [19]. As a result, higher position alignment can be realized due to the reduction in the thermal diffusion of the nanoparticles deposited on the substrate.…”
Section: Dressed-photon-assisted Near-field Processmentioning
confidence: 99%
“…(g) XRD θ -2θ scan result of (a) ZnO nanocrystals grown using photochemical vapor deposition (PCVD). PCVD reduces the growth temperature by producing reactive radicals via the photolysis of their precursors [19]. As a result, higher position alignment can be realized due to the reduction in the thermal diffusion of the nanoparticles deposited on the substrate.…”
Section: Dressed-photon-assisted Near-field Processmentioning
confidence: 99%
“…We previously reported on the room temperature (RT) growth of UV-emitting GaN using PCVD. 29,30) Here, we report observations of dendritic GaN nanostructures grown at RT using PCVD. These dendritic GaN nanostructures were similar in morphology to the DLA cluster.…”
mentioning
confidence: 96%