For intrinsic oxide semiconductors, oxygen vacancies served as the electron donors have long been, and inevitably still are, attributed as the primary cause of conductivity, making oxide semiconductors seem hard to act as high insulating materials. Meanwhile, the presence of oxygen vacancies often leads to a persistent photoconductivity phenomenon which is not conducive to the practical use in the fast photoelectric response devices. Herein, we propose a possible way to reduce the influence of oxygen vacancies by introducing a valence change doping in the monoclinic β-Ga 2 O 3 epitaxial thin film. The unintentional extra electrons induced by oxygen vacancies can be strongly suppressed by the change valence of the doped Mn ions from +3 to +2. The resistance for the Mn-doped Ga 2 O 3 increases two orders of magnitude in compared with the pure Ga 2 O 3 . As a result, photodetector based on Mn-doped Ga 2 O 3 thin films takes on a lower dark current, a higher sensitivity, and a faster photoresponse time, exhibiting a promising candidate using in high performance solar-blind photodetector. The study presents that the intentional doping of Mn may provide a convenient and reliable method of obtaining high insulating thin film in oxide semiconductor for the application of specific device.The intrinsic semiconductors always exhibit unintentional n-or p-type conductivity induced by native defects such as vacancies or interstitials 1,2 , leading to a difficulty in achieving high insulating material and limiting their use in the specific devices such as photodetector, dielectric layer, etc. In particular, for oxide semiconductors, the conductivity is often seen to exhibit a pronounced dependence on partial pressure of oxygen during growth 3,4 . It seems logical, that this conductivity is related to the presence of oxygen vacancies which served as the electron donors leading to a decrease in resistivity, as has been assumed for many years. In fact, with recent advances in growth techniques, particularly perhaps the advent of novel schemes of molecular beam epitaxy, it has become possible to grow thin films of oxide materials, as required for device applications, with rather high structural quality [5][6][7] . Notwithstanding this, however, oxygen vacancies have long been 6-8 , commonly and inevitably still are, attributed as the primary cause of conductivity in oxide semiconductors. Meanwhile, the presence of oxygen vacancies in oxides often leads to a persistent photoconductivity phenomenon since the carriers trapped by oxygen vacancies have longer lifetime and drift back to their original states slowly 9,10 . It is not conducive to the practical use in the fast photoelectric response devices. Take ZnO based photodetector as an example, the response time would extend to the order of minutes or hours due to the presence of oxygen vacancies 9,10 . In this work, we propose a possible way to suppress the unintentional extra carriers which are induced by oxygen vacancies and reduce the influence of oxygen vacancies by introducing...