Room temperature electrometry with SUB-10 electron charge resolution

Lee, Joshua; Zhu, Yong; Seshia, Ashwin A.

doi:10.1088/0960-1317/18/2/025033

Cited by 43 publications

(41 citation statements)

References 15 publications

(24 reference statements)

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“…With such approach, a high charge resolution of sub-10 electron has been realized at room temperature and ambient pressure. 9,10 Nevertheless, this charge modulation concept requires large sensing capacitance and the resolution is limited by the inherent parasitic capacitance. DETF resonators with dual micro-leverage mechanisms are reported to detect electric charge through measuring resonant frequency shift, which is induced by electrostatic forces between sensing capacitors.…”

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confidence: 99%

A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms

Chen

Zhao

et al. 2016

AIP Advances

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This letter reports a micro-electro-mechanical systems (MEMS) resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms. The sensor comprises two symmetrically-distributed double-ended tuning fork (DETF) resonators, each of which connects with dual micro-leverage mechanisms. The micro-leverages amplify electrostatic force in opposite directions and cause differential frequency shift of the two resonators. Both the resonators show a similar trend in behaviors of electrical and mechanical nonlinearity. Effect of environment disturbance is suppressed by the differential sensing scheme. The measured sensitivity of the two resonators are 3.31×10-4 Hz/fC2 and 1.85×10-4 Hz/fC2 respectively, and an overall sensitivity for the resonant charge sensor is 5.16×10-4 Hz/fC2.

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confidence: 99%

A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms

Chen

Zhao

et al. 2016

AIP Advances

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“…Sub-10 electron resolution has since been demonstrated for similar MEMS designs at room temperature [12], [13]. In comparison to these earlier demonstrations in which test charges were transferred from a local on-board capacitor, the real-time aerosol measurements described here pose several additional challenges including the need to collect the particle charge using a relatively large porous sampling electrode, introducing additional input capacitance and possible electromagnetic interference.…”

Section: A Principle Of Operation and Sensor Designmentioning

confidence: 99%

MEMS Electrometer With Femtoampere Resolution for Aerosol Particulate Measurements

Jaramillo

Buffa

et al. 2013

IEEE Sensors J.

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Electrostatic charge measurements are at the base of chemical, physical and biological experiments. In this paper, we present an electrometer based on the vibrating capacitance of a microelectromechanical systems (MEMS) resonator for the detection of small currents from ionized particles in an aerosol particle detection system. We use a porous sensing-electrode coupled to a MEMS resonating electrometer. Operating at resonance, charge is collected on the MEMS electrometer and modulated at the resonant frequency and its harmonics. Induced voltage is read with a low-leakage very high-input impedance feedback amplifier. Because of the specific readout technique, a switched-reset is used to prevent charge saturation. Sensitivity improvements are achieved by modifying the low noise-readout amplifier by reducing input-referred noise and parasitic capacitance. The electrometer achieves a noise floor <1 fA produced by 10 nm diameter particles within an airflow of 1.0 L/min. At this flow rate, the minimum detectable current (1 fA) corresponds to a minimum measureable particle density of 400 cm −3 . The MEMS electrometer is compared with and calibrated against commercial electrometer and a particle counter, respectively.

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“…Fully dielectric sensors allow sensing of electric fields without fundamental constraints on the size of the sensor and do not distort the incident field [12,13]. Ongoing efforts to develop compact electrometers include the use of the electro-optic effect within solid-state crystals [14], single-electron transistors [15][16][17], and the energy shifts induced by electric fields of atom-based sensors such as trapped ions [18] or Rydberg atoms [19,20]. Recently, optically addressable electron spins in solid-state materials have played a central role in the development of quantum sensing [21,22].…”

Section: Introductionmentioning

confidence: 99%

High-sensitivity spin-based electrometry with an ensemble of nitrogen-vacancy centers in diamond

et al. 2017

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We demonstrate a spin-based, all-dielectric electrometer based on an ensemble of nitrogen-vacancy (NV − ) defects in diamond. An applied electric field causes energy-level shifts symmetrically away from the NV − 's degenerate triplet states via the Stark effect; this symmetry provides immunity to temperature fluctuations allowing for shot-noise-limited detection. Using an ensemble of NV − s, we demonstrate shot-noise-limited sensitivities approaching 1 (V/cm)/ √ Hz under ambient conditions, at low frequencies (<10 Hz), and over a large dynamic range (20 dB). A theoretical model for the ensemble of NV − s fits well with measurements of the ground-state electric susceptibility parameter k ⊥ . Implications of spin-based, dielectric sensors for micron-scale electric-field sensing are discussed.

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Room temperature electrometry with SUB-10 electron charge resolution

Cited by 43 publications

References 15 publications

A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms

A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms

MEMS Electrometer With Femtoampere Resolution for Aerosol Particulate Measurements

High-sensitivity spin-based electrometry with an ensemble of nitrogen-vacancy centers in diamond

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