Rolled-up nanomembranes as compact 3D architectures for field effect transistors and fluidic sensing applications

Abstract

We fabricate inorganic thin film transistors with bending radii of less than 5 μm maintaining their high electronic performance with on-off ratios of more than 10(5) and subthreshold swings of 160 mV/dec. The fabrication technology relies on the roll-up of highly strained semiconducting nanomembranes, which compacts planar transistors into three-dimensional tubular architectures opening intriguing potential for microfluidic applications. Our technique probes the ultimate limit for the bending radius of high performance thin film transistors.

Compact helical antenna for smart implant applications

“…Self-assembled Swiss roll geometries have been applied to a wide range of rolled-up devices (for example, [37][38][39][40][41][42] ) based on semiconductor, oxide and metal strained layer engineering. However, for antenna applications, metal-based strained layers are not appropriate because of signal screening.…”

“…In addition, the proposed technology can be extended, and the helical antenna can be prepared in a single fabrication process out of the planar layout, accommodating various functional elements, including energy storage, 46,47 active electronics, 39 and magnetic 48 and fluidic 41 sensorics, hence realizing in vivo smart implants based on multifunctional compact electronics. 49 …”

Biomimetic Microelectronics for Regenerative Neuronal Cuff Implants

“…Inorganic rolled-up microtubes less than 10 µm in diameter have previously been shown to act as ultracompact microfl uidic channels with fully integrated electrodes and fi eld effect transistors, able to detect polar and ionic fl uids down to subnanomolar concentrations, sense single cancer cells, and guide neuronal outgrowth. [20][21][22] Medical applications of such tubular architectures have been envisioned for topographically mediated nerve growth, tissue engineering, and regeneration. [ 22 ] The opportunity to open/close such microscale devices upon external stimulation brings these applications closer to reality and is particularly appealing for neuronal cuff implant applications to enclose and guide the growth of nervous fi bers with a typical size of 10-50 µm.…”

Magnetic Micro-Origami

“…More advanced devices which combine microtubes with giant magnetoresistive sensors or semiconducting chemical sensors are available [68,69]. Magnetoresistive sensors prepared by micro-origami method were capable of detecting single magnetic nanoparticle passing thought a microtube.…”