Role of water in the tribochemical removal of bare silicon

Chen, Cheng; Xiao, Chen; Wang, Xiaodong; Zhang, Peng; Chen, Lei; Qi, Yaqiong; Qian, Linmao

doi:10.1016/j.apsusc.2016.08.175

Cited by 36 publications

(30 citation statements)

References 34 publications

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“…Thus, the contribution of F vdW to F a decreases with increasing RH (Figure 10b). Chen et al [4] measured the F a on a hydrophobic H-terminated Si surface (water contact angle~83 • ) and found that the force decreases substantially as the test environment transits from humid air to liquid water. During this process, A Hamaker is reduced by 80% [80,85,93].…”

Section: Effect Of Water Adsorption On Van Der Waals Forcementioning

confidence: 99%

“…Adhesion behaviors on hydrophobic surfaces (such as self-assembled monolayers [80,94], CaF 2 [83], Au-coated Si 3 N 4 [95], and HOPG [85]) may be independent of RH due to the negligible growth of the adsorbed water layer [41]. For instance, the water adsorbed on a hydrophobic Si surface with complete H termination (θ 2 =~83 • ) reveals a cluster-like structure, and its average thickness is less than one layer even when RH reaches the near-saturation level (Figure 5d) [4,59]. In this case, the capillary interaction is much weaker compared with other attractive forces (i.e., the van der Waals component), and its contribution to adhesion can be neglected [80,83,85,94].…”

Section: Effect Of Water Condensation On Capillary Forcementioning

confidence: 99%

“…Finally, besides interfacial forces, surface wear caused by frictional shear stress is likely to complicate the dynamics [4,159]. Tribochemical reactions may occur between water molecules and the solid surface when the activation energy of these reactions is reduced by an external mechanical action [5,[160][161][162][163][164][165][166][167].…”

Section: Perspectivesmentioning

confidence: 99%

“…Adsorption of water from the surrounding environment onto solid surfaces is inevitable unless the surface is chemically inert or its surface energy is extremely low. The extent of adsorption plays a crucial role in a broad range of industrial processes, such as microelectromechanical systems, nanomanufacturing, heterogeneous catalytic reactions, electronic devices/sensors, nanomechanics, and lubrication [3][4][5][6]. Indeed, water condensation causing high interfacial forces, such as adhesion (F a ) and friction (F t ), is a serious problem in micro/nanomaterial engineering when the surface-to-volume ratio becomes significantly large and the surface properties dominate the material performance [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

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Thickness and Structure of Adsorbed Water Layer and Effects on Adhesion and Friction at Nanoasperity Contact

Xiao

Shi

et al. 2019

Colloids and Interfaces

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Most inorganic material surfaces exposed to ambient air can adsorb water, and hydrogen bonding interactions among adsorbed water molecules vary depending on, not only intrinsic properties of material surfaces, but also extrinsic working conditions. When dimensions of solid objects shrink to micro- and nano-scales, the ratio of surface area to volume increases greatly and the contribution of water condensation on interfacial forces, such as adhesion (Fa) and friction (Ft), becomes significant. This paper reviews the structural evolution of the adsorbed water layer on solid surfaces and its effect on Fa and Ft at nanoasperity contact for sphere-on-flat geometry. The details of the underlying mechanisms governing water adsorption behaviors vary depending on the atomic structure of the substrate, surface hydrophilicity and atmospheric conditions. The solid surfaces reviewed in this paper include metal/metallic oxides, silicon/silicon oxides, fluorides, and two-dimensional materials. The mechanism by which water condensation influences Fa is discussed based on the competition among capillary force, van der Waals force and the rupture force of solid-like water bridge. The condensed meniscus and the molecular configuration of the water bridge are influenced by surface roughness, surface hydrophilicity, temperature, sliding velocity, which in turn affect the kinetics of water condensation and interfacial Ft. Taking the effects of the thickness and structure of adsorbed water into account is important to obtain a full understanding of the interfacial forces at nanoasperity contact under ambient conditions.

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Section: Effect Of Water Adsorption On Van Der Waals Forcementioning

confidence: 99%

Section: Effect Of Water Condensation On Capillary Forcementioning

confidence: 99%

Section: Perspectivesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Thickness and Structure of Adsorbed Water Layer and Effects on Adhesion and Friction at Nanoasperity Contact

Xiao

Shi

et al. 2019

Colloids and Interfaces

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“…Friction interfaces are those in which two surfaces contact and slide against each other. Complex nanosized or/and microsized dynamic phenomena, such as wear [1][2][3][4], tribofilm formations [5,6], and chemical reactions [7][8][9][10], occur in friction interfaces. However, it is difficult to understand the details of the complex friction phenomena in friction interfaces, because in situ direct observations and analyses of the friction interfaces with submicron order have not been performed.…”

Section: Introductionmentioning

confidence: 99%

Novel Method for Direct Observation of Friction Interfaces between SUJ2 Ball and Si<sub>3</sub>N<sub>4</sub> Thin Film Using Scanning Electron Microscopy

Kinoshita

Matsumoto

2019

Tribology Online

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In this study, a novel method was developed for in situ scanning electron microscopy (SEM) observations of friction interfaces, from a top view, using a Si 3 N 4 thin film (SiN film), which has high electron transmission ability, and a microtribometer. Nanodiamond (ND) aggregates were adsorbed on the back surface of the SiN film. A JIS-SUS304 ball, on which surface ND aggregates were adsorbed and tribofilms were already formed, contacted and slid with the back surface of the SiN film. An SEM electron beam went through the SiN film, and generated secondary electrons from the ball surface contacting the back surface of the SiN film and the adsorbed ND aggregates. Thereafter, the generated secondary electrons from the ball surface penetrated again through the SiN film and reached the SEM electron detector. In other words, the contacting ball surface and the adsorbed ND aggregates were successfully imaged through the SiN film. Energy dispersive X-ray spectroscopy analyses of the friction interfaces were also accomplished. Moreover, in situ SEM observations of friction interfaces under boundary lubrication, using poly-alpha olefin (PAO) oil with graphene oxide aggregates and lithium grease with MoS 2 particles, were successfully accomplished. The PAO oil and lithium grease had electron transmission ability, and the friction interfaces were imaged by SEM as seen with an optical microscope.

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Friction and Tribochemical Wear Behaviors of Native Oxide Layer on Silicon at Nanoscale

Chen

Xiao

et al. 2017

Tribol Lett

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Role of water in the tribochemical removal of bare silicon

Cited by 36 publications

References 34 publications

Thickness and Structure of Adsorbed Water Layer and Effects on Adhesion and Friction at Nanoasperity Contact

Thickness and Structure of Adsorbed Water Layer and Effects on Adhesion and Friction at Nanoasperity Contact

Novel Method for Direct Observation of Friction Interfaces between SUJ2 Ball and Si<sub>3</sub>N<sub>4</sub> Thin Film Using Scanning Electron Microscopy

Friction and Tribochemical Wear Behaviors of Native Oxide Layer on Silicon at Nanoscale

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