“…So-called “seed layers” are known to control perovskite nucleation, reduce the temperature of phase formation, improve the film crystalline degree, suppress the formation of planar defects, and prevent reaction between films and substrates. − Seed layers have been extensively used on Pt/Ti/SiO 2 /Si bottom electrodes to overcome the detrimental effects of microstructural heterogeneities and variations in the crystalline quality of the films and are known to prevent deterioration of the ferroelectric properties . So-called “buffer layers” between the ferroelectric film and platinized silicon substrate modify the residual stress state , which has a significant effect on the ferroelectric, piezoelectric, and dielectric properties and, along with “seed-layers”, have been used to control film orientation. , In addition to the use of buffer and seed layers, it has been known for many years that oxide electrodes used instead of plantinum (Pt on Ti/SiO 2 /Si) improve performance since they prevent undesired compositional modification and impede charge interdiffusion processes. − Table describes some examples of the effect of interlayers on ferroelectric films.…”