2022
DOI: 10.1016/j.jallcom.2022.166199
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Role of IGZO thickness for oxygen reservoir control in stacked IGZO/ZrOx layers: Towards reliable, uniform performance of flexible random-access memories

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Cited by 13 publications
(13 citation statements)
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“…Resistive random access memory (RRAM) features a nonvolatile character, simple structure, good miniaturization, fast operation speed, low power consumption, , and is regarded as one of the most promising nonvolatile memories of the next generation . Among various resistive materials used for RRAM, HfO 2 and ZrO 2 stand out to be the best candidates as high-k materials that are perfectly compatible with the complementary metal oxide semiconductor (CMOS) technology. …”
Section: Introductionmentioning
confidence: 99%
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“…Resistive random access memory (RRAM) features a nonvolatile character, simple structure, good miniaturization, fast operation speed, low power consumption, , and is regarded as one of the most promising nonvolatile memories of the next generation . Among various resistive materials used for RRAM, HfO 2 and ZrO 2 stand out to be the best candidates as high-k materials that are perfectly compatible with the complementary metal oxide semiconductor (CMOS) technology. …”
Section: Introductionmentioning
confidence: 99%
“…In addition, the effect of transition-metal doping on the RRAM system has attracted some attention. The results of Khera et al showed that Co doping can enhance the conductivity of the HfO 2 system; however, Kumar et al recently found that Ti doping c -HfO 2 results in a significant reduction in the electronic thermal conductivity of the system . Jaf et al found that the doping of transition metals (W, Nb, and Mo) in c -HfO 2 could reduce the current leakage of the system by first-principles calculations .…”
Section: Introductionmentioning
confidence: 99%
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“…To meet challenging aspects of key requirements for the aforementioned applications, multilevel nonvolatile memory (NVM) with novel form factors, coupled with complementary circuits with ultra-low power consumption, have been considered essential discrete components. [2,3] Various candidates using metal oxides (TaO x , HfO x , TiO x ZrO 2 , and IGZO), [4] perovskite oxides (Pr x Ca 1-x MnO 3 , SrTiO 3 , BaTiO 3 , and BiFeO 3 ), [5][6][7][8] metal halide perovskites (Cs 2 Cu 3 I 5 ), [9] and other materials are being investigated with great anticipation, for invisible complementary circuits and emerging NVMs.…”
mentioning
confidence: 99%
“…Among them, metal oxides have been predominantly studied and applied in contemporary electronics systems. [4,10,11] Despite the attractive properties of metal oxides, including CMOS process compatibility and desirable multilayer-stacking features on NVM, the development of metal oxides-based complementary circuit systems integrated with NVM have been constrained by challenges such as lack of prominent p-type candidates, low field effect mobility, and unstable electrical properties under light illumination, and others. [12,13] Thus, halide materials (γ-CuI) have been investigated as one alternative p-type semiconductor in flat panel displays, because of their essential traits including optical transparency (approximately direct bandgap of 3.1 eV), [14] low electrical resistivity (≈72 mΩ cm), and high Hall mobility of 51.6 cm 2 V -1 s -1 .…”
mentioning
confidence: 99%