Role of embedded titanium nanoparticles for enhanced chemical vapor deposition diamond formation on silicon

Shima, R.; Chakk, Y.; Folman, M.; Hoffman, A.; Lai, Fu-Shun; Prawer, S.

doi:10.1116/1.590848

Cited by 10 publications

(2 citation statements)

References 33 publications

(23 reference statements)

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“…Devices fabricated entirely from polymers are now available, opening up the possibility of adapting polymer processing technologies to fabricate inexpensive, large-area devices using non-lithographic techniques [3,4]. Nanostructured materials have attracted much recent attention due to their important roles in many technological areas such as heterogeneous catalysis [5], photonics [6], single electron and quantum devices [7]. The development of nanotechnology requires good understanding of the evolution of the shape, size and distribution of nanoparticles in different growth processes [8,9].…”

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Growth of self-assembled copper nanostructure on conducting polymer by electrodeposition

Sarkar

Zhou

Tannous

et al. 2003

Solid State Communications

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In the present work, self-assembled nanostructures of copper are grown by electrodeposition on a thin conducting polymer (polypyrrole) film electropolymerized on a gold electrode. The shapes, sizes and the densities of the nanostructures are found to depend on the thickness of the polypyrrole thin film, which provides an easy means to control the morphology of these nanostructures. In particular, for the same applied potential on the gold electrode, smaller nanocrystals with a higher density are observed on thinner polymer films while bigger nanocrystals at a lower density are found on thicker films. The generation of nanostructured materials on a surface is a new thrust in materials science due to the continuing miniaturization of electronic and mechanical devices. In general, feature sizes 30 -300 nm and larger are routinely produced by electron-beam and photolithography techniques, respectively. Important progress has been made over the past few years in the preparation of ordered ensembles of metal and semiconductor nanocrystals to fabricate feature size less than 30 nm [1,2]. Devices fabricated entirely from polymers are now available, opening up the possibility of adapting polymer processing technologies to fabricate inexpensive, large-area devices using non-lithographic techniques [3,4]. Nanostructured materials have attracted much recent attention due to their important roles in many technological areas such as heterogeneous catalysis [5], photonics [6], single electron and quantum devices [7]. The development of nanotechnology requires good understanding of the evolution of the shape, size and distribution of nanoparticles in different growth processes [8,9]. Nanoparticles have been commonly grown in physical [10,11] and electrochemical processes [12 -16]. In the physical deposition process, the deposition rate and surface diffusion coefficient determine the shape, size and density of the nanoparticles on a specific substrate surface [17]. On the other hand, the concentration and pH of the electrolyte as well as the applied potential all play a prominent role in the electrochemical deposition process [18]. The use of an STM tip to develop copper nanostructures on a single-crystal gold electrode electrochemically has also been demonstrated [19]. Two common growth modes can be defined either as progressive or instantaneous, in the electrochemical deposition process, depending on the surface energies of the substrate and the deposited materials as well as their interface energy. In the Volmer -Weber growth process, the growth mode is instantaneous due to the large difference in the surface energies of the substrate and the deposited material [20]. The number of active nucleation sites is proportional to the applied potential because the nucleation barrier becomes lower with increasing applied potential [21].Organic conducting polymers, particularly in the form of thin films, are attractive candidates for microelectronic applications [22,23] due to their unique combination of electrical, mechanical ...

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Growth of self-assembled copper nanostructure on conducting polymer by electrodeposition

Sarkar

Zhou

Tannous

et al. 2003

Solid State Communications

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“…[15][16][17], or by so-called bias enhanced nucleation (BEN) [18,19]. Mechanical treatments are simple and effective, but limited to planar surfaces, while BEN requires the substrate to be conductive.…”

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confidence: 99%

Analytical TEM study of CVD diamond growth on TiO2 sol–gel layers

Verbeeck

Turner

et al. 2012

Diamond and Related Materials

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The early growth stages of chemical vapor deposition (CVD) diamond on a sol-gel TiO 2 film with buried ultra dispersed diamond seeds (UDD) have been studied. In order to investigate the diamond growth mechanism and understand the role of the TiO 2 layer in the growth process, high resolution transmission electron microscopy (HRTEM), energy-filtered TEM and electron energy loss spectroscopy (EELS) techniques were applied to cross sectional diamond film samples. We find evidence for the formation of TiC crystallites inside the TiO 2 layer at different diamond growth stages. However, there is no evidence that diamond nucleation starts from these crystallites. Carbon diffusion into the TiO 2 layer and the chemical bonding state of carbon (sp 2 /sp 3 ) were both extensively investigated. We provide evidence that carbon diffuses through the TiO 2 layer and that the diamond seeds partially convert to amorphous carbon during growth. This carbon diffusion and diamond to amorphous carbon conversion make the seed areas below the TiO 2 layer grow and bend the TiO 2 layer upwards to form the nucleation center of the diamond film. In some of the protuberances a core of diamond seed remains, covered by amorphous carbon. It is however unlikely that the remaining seeds are still active during the growth process. Crown

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Enhanced nucleation and post-growth investigations on HFCVD diamond films grown on silicon single crystals pretreated with Zr:diamond mixed slurry

Dua

Roy

Nuwad

et al. 2004

Applied Surface Science

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Role of embedded titanium nanoparticles for enhanced chemical vapor deposition diamond formation on silicon

Cited by 10 publications

References 33 publications

Growth of self-assembled copper nanostructure on conducting polymer by electrodeposition

Growth of self-assembled copper nanostructure on conducting polymer by electrodeposition

Analytical TEM study of CVD diamond growth on TiO2 sol–gel layers

Enhanced nucleation and post-growth investigations on HFCVD diamond films grown on silicon single crystals pretreated with Zr:diamond mixed slurry

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