2015
DOI: 10.1103/physrevb.91.085311
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Role of boron diffusion in CoFeB/MgO magnetic tunnel junctions

Abstract: Several scientific issues concerning the latest generation read heads for magnetic storage devices, based on CoFeB/MgO/CoFeB magnetic tunnel junctions (MTJs) are known to be controversial, including such fundamental questions as to the behavior and the role of B in optimizing the physical properties of these devices. Quantitatively establishing the internal structures of several such devices with different annealing conditions using hard x-ray photoelectron spectroscopy, we resolve these controversies and esta… Show more

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Cited by 42 publications
(28 citation statements)
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“…(3) is straightforward, see, e.g., Ref. 15, and we find that for each direction of semiclassical propagation satisfying the condition…”
Section: Andreev Bound Statessupporting
confidence: 54%
See 1 more Smart Citation
“…(3) is straightforward, see, e.g., Ref. 15, and we find that for each direction of semiclassical propagation satisfying the condition…”
Section: Andreev Bound Statessupporting
confidence: 54%
“…The quasi-two-dimensional tetragonal case, which is applicable to Sr 2 RuO 4 and the ironbased superconductors, was previously studied in Ref. 15. The heavy-fermion superconductor UPt 3 has a complicated phase diagram, with two distinct phases (called A and B phases) even in the absence of external magnetic field, see Ref.…”
Section: Introductionmentioning
confidence: 99%
“…The Ru capping layer is deposited by e-beam evaporation and prevents the underlying layers from oxidation. Ex-situ annealing with applied bias field is performed to crystallize the amorphous CoFeB electrodes and the MgO layer to obtain coherent interfaces and to activate the diffusion of B into the Ta layers [37][38][39]. Afterwards elliptical MTJs are patterned to a size of 6μm × 4μm with the long axis parallel to the direction of the magnetic field applied during the annealing by lithography processes.…”
Section: Sample Fabricationmentioning
confidence: 99%
“…Beni et al [37] used a similar approach to estimate layer resolved compositional variation in complex Al-Cr-Fe metallic alloy systems. Mukherjee et al [38] used a similar methodology to estimate thickness of the CoFeB and MgO layer in CoFeB/MgO/CoFeB magnetic tunnel junctions (MTJs) to resolve an outstanding controversy [39], establishing that boron did not diffuse beyond one or two atomic planes at the interface in a suitably formed device structure.…”
Section: Depth Profiling From Haxpesmentioning
confidence: 99%