2017
DOI: 10.1007/s40094-017-0268-6
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Role of Ar/O2 mixture on structural, compositional and optical properties of thin copper oxide films deposited by DC magnetron sputtering

Abstract: In this study, the effect of oxygen content on a thin copper oxide layer deposited on BK7 and steel substrates by DC magnetron sputtering were investigated. Argon as working gas with impurity of 99.9% and various oxygen ratios were used to sputter a pure Cu cathode target in a cylindrical geometry. The produced samples were analyzed by X-ray diffraction (XRD), energy-dispersive X-ray (EDX), atomic force microscopy (AFM), and spectrophotometry techniques. The films thickness was measured by profilometer facilit… Show more

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Cited by 9 publications
(4 citation statements)
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“…The height and the wavelength of the excitonic absorption peaks depends on the concentration and size of NPs respectively while the width of the peak is mostly dependent on their morphology. Of course, these characteristics of NPs may be controlled by laser beam parameters including fluence, wavelength, pulse width, and spot size [29-31].
Figure 4 UV–Vis–NIRspectra (a) absorption of cobalt oxide NPs suspension and (b) reflection of cobalt oxide thin films.
…”
Section: Resultsmentioning
confidence: 99%
“…The height and the wavelength of the excitonic absorption peaks depends on the concentration and size of NPs respectively while the width of the peak is mostly dependent on their morphology. Of course, these characteristics of NPs may be controlled by laser beam parameters including fluence, wavelength, pulse width, and spot size [29-31].
Figure 4 UV–Vis–NIRspectra (a) absorption of cobalt oxide NPs suspension and (b) reflection of cobalt oxide thin films.
…”
Section: Resultsmentioning
confidence: 99%
“…A lot of different parameters can change the compositions, properties and textures of films deposited by DC sputtering. For instance, the substrate used can impact the nature and crystallinity of the deposit, [62] the composition/concentration of inert gases employed can affect the particles size, [63] the film porosity can be tuned by varying the substrate tilt angle, [64] the chemistry and morphology of the film can be changed by using reactive gases (e. g., O 2 , [65] N 2 [62] ), or again the sputtering rate, sputtering pressure and substrate temperature can strongly impact the surface roughness and grain sizes of the coating. [66] The first parameter investigated in this study is the substrate tilt angle (Θ) (see Figure 1a).…”
Section: Influence Of Tilt Anglementioning
confidence: 99%
“…Several researchers studied the effect of oxygen mean pressures and concluded the impact of OMP on the thin-films structural, electrical, and optical properties. The phase composition, crystal structure, and optical behavior of the metal oxide thin-films can be controlled by adjusting the oxygen flow rate in the sputtering process [13][14][15][16].…”
mentioning
confidence: 99%