Robust Precision Position Detection With an Optical MEMS Hybrid Device

Hortschitz, Wilfried; Steiner, Harald; Sachse, M.; Stifter, Matthias; Köhl, F.; Schalko, J.; Jachimowicz, A.; Keplinger, Franz; Sauter, Thilo

doi:10.1109/tie.2011.2173096

Cited by 40 publications

(17 citation statements)

References 39 publications

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“…The presented magnetometer combines the advantageous of the resonant operation principle [1], the optical readout which decouples the sensing part from the electronics components [2] and a three-dimensional compliant mechanism which proves the potential of additive manufacturing. Literature about additive manufacturing and a study investigating 3D-printed magnetic field sensors can be found in [3,4], respectively.…”

Section: Introductionmentioning

confidence: 98%

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3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

et al. 2018

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This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product development cycles. In addition, 3D-printing enables ‘true’ three-dimensional MEMS structures in contrast to the traditional MEMS technology which allows only two dimensional structures. The measurement approach comprises a hybrid implementation of an optical modulator, an LED and a photodetector.

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Section: Introductionmentioning

confidence: 98%

“…The curved beams transform the out-of-plane deflection into an in-plane movement of the mass by redirecting any perpendicular force into a lateral displacement. Introduced light through the apertures is modulated by relative in-plane movement of the movable mask and second opposite-aligned fixed grating [2].…”

Section: Introductionmentioning

confidence: 99%

3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

et al. 2018

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“…The presented magnetometer benefits from the resonant operation principle [4], i.e., magnitude amplification and the advantage of the optical readout which has proven to be highly sensitive [5,6]. Recently, a silicon Lorentz force based transducer for magnetic field detection was demonstrated in [7].…”

Section: Introductionmentioning

confidence: 99%

Novel 3D-Printed MEMS Magnetometer with Optical Detection

et al. 2018

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This paper reports a novel 3D printed MEMS magnetometer with optical readout, which demonstrates the advantages of 3D printing technology in terms of rapid prototyping. Low-cost and fast product development cycles favour 3D printing as an effective tool. Sensitivity measurement with such devices indicate high accuracy and good structural performance, considering material and technological uncertainties. This paper is focusing on the novelty of the rapid, 3D-printing prototyping approach and verification of the working principle for printed MEMS magnetometers.

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“…The laser cuts on the frame interrupt the conductive layer, thus forcing an applied current over the deflectable mass. The structured grid lines on the mass shall guide light through the glass for a future compact optical detection of modulated light as demonstrated in [5,6].…”

Section: Introductionmentioning

confidence: 99%

Borosilicate Glass MEMS Lorentz Force Magnetometer

et al. 2018

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This paper reports on a novel, miniaturized magnetomechanical transducer/sensor made of borosilicate glass with wide dynamic range. The prototype is manufactured with laser micromachining and ablation techniques. Compared to state of the art, borosilicate glass substrate offers the highest thermal shock resistance and is best suited for MEMS magnetometers, for aerospace and space applications or magnetic monitoring systems for diagnostics and plasma stability control of nuclear fusion experiments, where thermal shock resistance is a critical requirement.

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Robust Precision Position Detection With an Optical MEMS Hybrid Device

Cited by 40 publications

References 39 publications

3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

Novel 3D-Printed MEMS Magnetometer with Optical Detection

Borosilicate Glass MEMS Lorentz Force Magnetometer

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