Robust Multiple Frequency Trajectory Tracking Control of Piezoelectrically Driven Micro/Nanopositioning Systems

Bashash, Saeid; Jalili, Nader

doi:10.1109/tcst.2007.902949

Cited by 136 publications

(68 citation statements)

References 31 publications

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“…The auxiliary control signal in (21) can be substituted into (20) to obtain the following expression…”

Section: Closed-loop Error Systemmentioning

confidence: 99%

“…Recently, the literature has focused on the development of alternate models to describe the hysteresis within the PZTA, owing to the challenging non-linear nature of this phenomenon. In Bashash and Jalili [20], proposed a dynamic model by combining the PrandtlIshlinskii hysteresis operator with a second-order linear dynamics. In Yeh et al [21], included a non-linear spring element into the hysteresis model and utilised a Maxwellslip structure, whereas Ji et al [22] used a support vector regression non-linear model and neural networks.…”

Section: Introductionmentioning

confidence: 99%

“…Wu and Zou [37] presented an inversion-based iterative control approach to compensate for both the hysteresis and the vibrational dynamics variations during high-speed, large-range tracking. The focus of recent research was devoted to the design and application of robust control techniques to PZTA systems for micro/nanomanipulation [20,[38][39][40][41][42][43][44].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Charge feedback-based robust position tracking control for piezoelectric actuators

Salah

McIntyre

Dawson

et al. 2012

IET Control Theory Appl.

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Abstract:In this study, the Coleman-hysteresis model is utilised in the piezoelectric actuator (PZTA) dynamic model and a non-linear robust control strategy is then developed to actively control the displacement of the PZTA effective tip. The proposed control technique is designed based on the partial knowledge of the hysteresis model while the mass of the PZTA is assumed to be uncertain. The piezoelectric charge measurement is utilised in the controller design to reduce the effects of the hysteresis. Lyapunov-based stability analysis techniques are utilised to ensure that a desired displacement trajectory is accurately tracked. Representative numerical results are presented and discussed to demonstrate the tracking performance of several desired displacement trajectories with different frequencies and amplitudes. Finally, comparisons with a standard PID controller and a sliding mode controller were performed to examine the effectiveness of the proposed control design.

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“…The auxiliary control signal in (21) can be substituted into (20) to obtain the following expression…”

Section: Closed-loop Error Systemmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Charge feedback-based robust position tracking control for piezoelectric actuators

Salah

McIntyre

Dawson

et al. 2012

IET Control Theory Appl.

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“…An impedance controller is used for the master manipulator. The desired impedance for the master manipulator can be shown as: (9) where j m , b m and k m are the desired inertia, viscous damping coefficient and stiffness, respectively. The right side of this equation reflects the scaled contact force between the environment and the slave manipulator.…”

Section: Impedance Control For the Master Robotmentioning

confidence: 99%

“…There is a linear electromechanical coupling between the induced charge and the excitation force. A linear dynamic relationship between the excitation force and the actuator displacement is also present (9). Although the effect of hysteresis could be bypassed with control of the induced charge, costly instrumentation is required for the measurement and amplification of the induced charge (10,11).…”

Section: Introductionmentioning

confidence: 99%

Development of a piezo‐actuated micro‐teleoperation system for cell manipulation

Zareinejad

Rezaei

Abdullah

et al. 2009

Robotics Computer Surgery

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Background Intracytoplasmic sperm injection (ICSI) requires long training and has low success rates, primarily due to poor control over the injection force. Making force feedback available to the operator will improve the success rate of the injection task. A macro-micro-teleoperation system bridges the gap between the task performed at the micro-level and the macroscopic movements of the operator. The teleoperation slave manipulator should accurately position a needle to precisely penetrate a cell membrane. Piezoelectric actuators are widely used in micromanipulation applications; however, hysteresis non-linearity limits the accuracy of these actuators.

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Adaptation‐Enhanced Model‐Based Control with Charge Feedback for Piezo‐Actuated Stage

Yeh

Yen

2018

Asian Journal of Control

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This paper proposes a new control design to compensate for the residual control error from charge feedback control. A part of the applied voltage is consumed by the hysteresis effect because of the nature of the piezoelectric material; moreover, this effect is difficult to overcome because it is rate dependent. This work utilizes a piezoelectric electromechanical model to propose a precompensation algorithm for a piezoelectric actuator. A nonlinear compensator can be used to treat both the hysteresis nonlinearity and the rate dependency of the system, and the adjustable parameters are specified through adaptive identification with only basic system information. The proposed design can position a piezoelectric stage with a magnifying mechanism within a few nanometers of a target, and the leftover hysteresis phenomenon is negligible.

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Robust Multiple Frequency Trajectory Tracking Control of Piezoelectrically Driven Micro/Nanopositioning Systems

Cited by 136 publications

References 31 publications

Charge feedback-based robust position tracking control for piezoelectric actuators

Charge feedback-based robust position tracking control for piezoelectric actuators

Development of a piezo‐actuated micro‐teleoperation system for cell manipulation

Adaptation‐Enhanced Model‐Based Control with Charge Feedback for Piezo‐Actuated Stage

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