2001
DOI: 10.1063/1.1423776
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Robust microfabricated field-effect sensor for monitoring molecular adsorption in liquids

Abstract: We show that a microfabricated field-effect sensor located at the terminus of a freestanding cantilever can detect surface potential changes resulting from the adsorption of charged molecules in an aqueous environment. The charge sensitive region, defined by lightly doped silicon, is embedded within the heavily doped silicon cantilever. Since both the electrical trace and sensitive region are passivated with thermally diffused silicon dioxide, the entire cantilever can be immersed in buffer solutions and clean… Show more

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Cited by 17 publications
(17 citation statements)
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“…The field-effect sensors used in this work are EIS capacitors microfabricated at the termini of silicon cantilevers according to a process described in detail elsewhere (ref. 23; Fig. 1c).…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The field-effect sensors used in this work are EIS capacitors microfabricated at the termini of silicon cantilevers according to a process described in detail elsewhere (ref. 23; Fig. 1c).…”
Section: Methodsmentioning
confidence: 99%
“…The high-impedance EIS structure prevents faradaic processes on the sensor surface that could deteriorate the sensors or analytes. Sensors are operated at a bias voltage where their response is linear and most sensitive to surface potential changes, i.e., at the inflection point of their capacitance-versus-voltage curves (23). The resulting periodic charging current on the sensors is amplified and measured by using a lock-in amplifier with a 100-ms time constant.…”
Section: Methodsmentioning
confidence: 99%
“…The p-type field-sensitive region was biased into partial depletion to maximize sensitivity to changes in surface potential. The n-type substrate was biased to 1 V. Capacitance-voltage curves of the EIS structure were acquired to determine the optimal p-type bias point (51). The surface potential resolution was Ϸ10 V in a 1-Hz bandwidth and the linear range was Ϸ100 mV.…”
Section: Methodsmentioning
confidence: 99%
“…EIS structures enable a simple and highly sensitive measurement of surface potential at the electrolyte insulator interface, (37,38), and they have been previously used to measure pH and the adsorption of highly charged molecules such as DNA (39,40). To address the need for LMWH monitoring, we demonstrate that a protamine-functionalized EIS can measure the concentration of enoxaparin and that an AT-IIIfunctionalized EIS can selectively detect the physiologically active pentasaccharide domain in unfractionated heparin and fondaparinux.…”
mentioning
confidence: 99%
“…6,7 However, in order to detect DNA molecules, it is required to immobilize single-stranded probes on the surface of the ion-sensitive devices for the hybridization of single-stranded complementary target molecules in the electrolyte solution [8][9][10] or to deposit a positively charged layer such as poly-L-lysine on the sensing electrodes to attract the negatively charged nucleic acid molecules. 11,12 These additional processes increase reaction time and the complexity in detection protocols. Furthermore, it is difficult to incorporate the continuous monitoring for repetitive assays ͑e.g., real-time quantitative PCR͒ for these protocols because the regeneration of the sensing surface requires a complicated rinsing sequence.…”
mentioning
confidence: 99%