2009
DOI: 10.1007/s00339-009-5126-1
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Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Abstract: We present a free-space optical interconnect system capable of dynamic closed-loop optical alignment using a microlens scanner with a proportional integral and derivative controller. Electrostatic microlens scanners based on combdrive actuators are designed and characterized with vertical cavity surface emitting lasers (VCSELs) for adaptive optical beam tracking in the midst of mechanical vibration noise. The microlens scanners are fabricated on siliconon-insulator wafers with a bulk micromachining process usi… Show more

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Cited by 19 publications
(8 citation statements)
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References 28 publications
(33 reference statements)
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“…Steering of beams carrying Gb of data has been done over distances of 30 cm using MEMS lenses instead of mirrors [5][6]. In that instance, the steering feedback loop utilized a position sensitive detector which sensed the beam from a beam splitter which was precisely aligned with the target detector.…”
Section: Optical Steeringmentioning
confidence: 99%
“…Steering of beams carrying Gb of data has been done over distances of 30 cm using MEMS lenses instead of mirrors [5][6]. In that instance, the steering feedback loop utilized a position sensitive detector which sensed the beam from a beam splitter which was precisely aligned with the target detector.…”
Section: Optical Steeringmentioning
confidence: 99%
“…Optical beam steering is important for engineered light projection in numerous applications including displays 1 , 2 , microscopy 3 6 light detection and ranging (LiDAR) 7 , 8 , communications 9 , 10 , and ion/atom manipulation in quantum processors 11 13 Most commonly, beam scanning is implemented with discrete components, such as galvo-scanners, micro-electromechanical systems (MEMS) mirrors, or acousto-optic deflectors 14 . In recent years, the demand to reduce the size of beam scanners into microchips for easier integration into products has motivated rapid advances in optical phased arrays (OPAs) and focal plane switch arrays (FPSAs) using silicon (Si) photonic integrated circuit (PIC) technology 15 17 FPSAs illuminate discrete points, while OPAs offer continuous angular coverage.…”
Section: Introductionmentioning
confidence: 99%
“…Parallel data transmission through optical means between boards has been demonstrated with complex packaging involving discrete micro and macro lenses and stage-alignment tools [19,20]. Free-space optical interconnects between VCSELs and PDs placed on separate boards have been demonstrated in which fixed integrated micro-lens arrays [21,22] or MEMS controlled lens arrays were used to lower optical loss by reducing the beam divergence [23][24][25][26][27]. In this paper, intra-board and inter-board optical interconnects are demonstrated.…”
Section: Introductionmentioning
confidence: 99%