Robust digital tracking controller design for high-speed positioning systems

Endo, Shuji; Kobayashi, Hirokazu; Kempf, Carl J.; Kobayashi, Shinichi; Tomizuka, Masayoshi; Hori, Yoichi

doi:10.1016/0967-0661(96)00036-6

Cited by 69 publications

(15 citation statements)

References 2 publications

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“…Up to now many types of controllers have been proposed and evaluated for positioning systems; for example the model following type controller such as controllers with disturbance observer [1][2][3][4], time-optimal controllers [5][6][7][8] and sliding mode controllers [9,10]. These controllers will Manuscript received January 12, 2007.…”

Section: Introductionmentioning

confidence: 99%

Robustness evaluation of fuzzy-based NCTF control of point-to-point (PTP) positioning systems

Wahyudi

Ibrahim

Salami

2007

2007 IEEE/ASME International Conference on Advanced Intelligent Mechatronics

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The positioning systems generally need a good controller to achieve high accuracy, fast response and robustness. In addition, ease of controller design and simplicity of controller structure are very important for practical application. For satisfying these requirements, NCTF (nominal characteristic trajectory following controller) has been proposed as a practical point-to-point (PTP) positioning control. However, the NCTF control system has a PI compensator which is designed without systematic procedure for obtaining the best PI compensator parameters. To overcome this problem, in this paper, fuzzy compensator is proposed and used to replace the PI compensator. The effectiveness of the proposed Fuzzy-based NCTF controller is evaluated and compared with those of normal NCTF and PID controllers through simulation. Furthermore, robustness to parameter variations of the NCTF controller with the proposed fuzzy compensator is also studied. Simulation results show that the NCTF controller with fuzzy compensator is not only effective for PTP positioning system but also robust to inertia variation.

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Section: Introductionmentioning

confidence: 99%

Robustness evaluation of fuzzy-based NCTF control of point-to-point (PTP) positioning systems

Wahyudi

Ibrahim

Salami

2007

2007 IEEE/ASME International Conference on Advanced Intelligent Mechatronics

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“…The loop transfer function of the nominal system is Ä´×µ É´×µ Ñ× ½ É´×µ Ñ× (12) and the complementary transfer function is Ì´×µ Ä´×µ ½ · Ä´×µ É´×µ Ñ× (13) Hence, for a multiplicative uncertainty ¡´×µ ¾ À ½ , the system is robustly stable if É´×µ ½ ½ ¡´×µ ½ , i.e. the magnitude frequency response of É´×µ stays beneath that of ½ ¡´×µ .…”

Section: Design Of é´×µ To Reject Ramp/stepmentioning

confidence: 99%

“…Umeno and Hori [11] refined it and applied it to the robust control of DC servo motors. Endo et al [12] and Kempf and Kobayashi [13] applied it to control the high-speed direct-drive positioning table. In these literature, the dead time in the process was not included or only included using the Pade approximation in the nominal model [14] in continuous domain.…”

Section: Introductionmentioning

confidence: 99%

Control of integral processes with dead-time. Part 1: Disturbance observer-based 2DOF control scheme

Zhong

Normey‐Rico

2002

IEE Proceedings - Control Theory and Applications

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This paper reveals that a disturbance observer-based control scheme is very effective in controlling integral processes with dead time. The controller can be designed to reject ramp disturbances as well as step disturbances, even arbitrary disturbances. Only two parameters are left to tune when the plant model is available . One is the time constant of the setpoint response and the other is the time constant of the disturbance response. The latter is tuned according to the compromise between disturbance response and robustness. This control scheme has a simple, clear, easy-to-design, easy-to-implement structure and good performances. It is compared to the best results (so far) using some simulation examples.

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“…In addition to friction modeling, there are some studies using disturbance observer approach to design control systems. Lee H S, Endo S and Kempf C J [10][11][12] designed corresponding disturbance observer-based(DOB) for different system. However, the researches of Xu L and Yao B [13,14] show that DOB cannot handle wide range parameter uncertainty well.…”

Section: Introductionmentioning

confidence: 99%

An adaptive neural network backstepping control method for reticle stage of lithography

Wang

Chen

Liu

et al. 2014

Proceeding of the 11th World Congress on Intelligent Control and Automation

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This paper proposes an adaptive neural network backstepping tracking control method for the long-stroke reticle stage of lithography. The main feature of this method is that it can real-time online estimate the unknown model parameters of long-stroke reticle stage actuator under some nonlinear effects including load disturbance, force ripple and slot effect by radial basis function(RBF) neural network. First, in the study according to the actual system a nominal model of long-stroke reticle stage is established. Then, with this nominal model the derivation of the control method, the design of the adaptive law and the Lyapunov stability proof are made. From the results of the analysis above, it can be seen that this control method can sufficiently guarantee the convergence of the system's position and velocity errors. At last, this control method is verified by a simulation experiment. From the result of fifth-order S-curve tracking test, the tracking accuracy of the position and velocity can meet the design requirements well. Because it doesn't need to model the actual mechanical system and external uncertainties precisely, this method is very suitable for application in the field of ultra-precision manufacturing. Index Terms -lithography; reticle stage; neural network; backstepping; adaptive [ ( , ) ( , ) ] d d d in d

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Robust digital tracking controller design for high-speed positioning systems

Cited by 69 publications

References 2 publications

Robustness evaluation of fuzzy-based NCTF control of point-to-point (PTP) positioning systems

Robustness evaluation of fuzzy-based NCTF control of point-to-point (PTP) positioning systems

Control of integral processes with dead-time. Part 1: Disturbance observer-based 2DOF control scheme

An adaptive neural network backstepping control method for reticle stage of lithography

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