Robust design optimization of electro-thermal microactuator using probabilistic methods

Safaie, B. Khayatzadeh; Shamshirsaz, Mahnaz; Bahrami, Mohsen

doi:10.1007/s00542-015-2593-5

Cited by 3 publications

(1 citation statement)

References 23 publications

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“…To avoid such effects and correctly trusting all the measurements acquired during the experimental campaign, a batch approach like GA is preferred here. GAs have been already adopted for the robust optimization of MEMS structures (see, e.g., [ 19 , 20 , 21 ]), but, to the best of our knowledge, not for parameter identification purposes.…”

Section: Introductionmentioning

confidence: 99%

Uncertainty Quantification of Microstructure—Governed Properties of Polysilicon MEMS

Mirzazadeh

Mariani

2017

Micromachines

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In this paper, we investigate the stochastic effects of the microstructure of polysilicon films on the overall response of microelectromechanical systems (MEMS). A device for on-chip testing has been purposely designed so as to maximize, in compliance with the production process, its sensitivity to fluctuations of the microstructural properties; as a side effect, its sensitivity to geometrical imperfections linked to the etching process has also been enhanced. A reduced-order, coupled electromechanical model of the device is developed and an identification procedure, based on a genetic algorithm, is finally adopted to tune the parameters ruling microstructural and geometrical uncertainties. Besides an initial geometrical imperfection that can be considered specimen-dependent due to its scattering, the proposed procedure has allowed identifying an average value of the effective polysilicon Young’s modulus amounting to 140 GPa, and of the over-etch depth with respect to the target geometry layout amounting to O=−0.09 μm. The procedure has been therefore shown to be able to assess how the studied stochastic effects are linked to the scattering of the measured input–output transfer function of the device under standard working conditions. With a continuous trend in miniaturization induced by the mass production of MEMS, this study can provide information on how to handle the foreseen growth of such scattering.

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Section: Introductionmentioning

confidence: 99%

Uncertainty Quantification of Microstructure—Governed Properties of Polysilicon MEMS

Mirzazadeh

Mariani

2017

Micromachines

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Design and fabrication of an electrothermal MEMS micro-actuator with 3D printing technology

Ülkir

2020

Mater. Res. Express

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This study presents the design and fabrication results of an electrothermal micro-electro-mechanical system (MEMS) actuator. Unlike traditional one-directional U-shaped actuators, this bi-directional electrothermal (BET) micro-actuator can produce displacements in two directions as a single device. The BET micro-actuator was fabricated using two-photon polymerization (2PP) and digital light processing (DLP) methods, which are 3D printing techniques. These methods have been compared to see the success of BET micro-actuator fabrication. The compound of these methods and the essential coefficients through the 3D printing operation were applied. Evaluation experiments have demonstrated that in both methods, the 3D printer can print materials smaller than 95.7 μm size features. Though the same design was used for the 2PP and DLP methods, the supporting structures were not produced with the 2PP. The BET micro-actuator was manufactured by removing the supports from the original design in the 2PP. The number of supports, the diameter, and height on the arms of the micro-actuator is 18, 4 μm, and 6 μm, respectively. Although 4 μm diameter supports could be produced with the DLP, it was not possible to produce them with 3D printing device based on 2PP. Besides, the DLP was found to be better than the 2PP for the manufacturing of asymmetrical support structures. The fabrication process has been carried out successfully by two methods. When the fabrication success is compared, the surface quality and fabrication speed of the micro-actuator fabricated with DLP is better than the 2PP. Presented results show the efficiency of the 3D printing technology and the simplicity of fabrication of the micro-actuator via 2PP and DLP. An experimental study was carried out to characterize the relationship between displacement and input voltage for the micro-actuator. Experimental results show that the displacement range of the micro-actuator is 8 μm with DLP, while 6 μm with 2PP.

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Selecting Robust Multi-Objective Optimization of a MEMS Electro-Thermal Actuator Considering Multi-Source Uncertainties

Zhu

Cao

Kong

et al. 2023

IEEE Trans. Electron Devices

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Robust design optimization of electro-thermal microactuator using probabilistic methods

Cited by 3 publications

References 23 publications

Uncertainty Quantification of Microstructure—Governed Properties of Polysilicon MEMS

Uncertainty Quantification of Microstructure—Governed Properties of Polysilicon MEMS

Design and fabrication of an electrothermal MEMS micro-actuator with 3D printing technology

Selecting Robust Multi-Objective Optimization of a MEMS Electro-Thermal Actuator Considering Multi-Source Uncertainties

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