Robust controller design for a dual-stage positioning system

Yao, Wei; Tomizuka, Masayoshi

doi:10.1109/iecon.1993.339105

Cited by 14 publications

(10 citation statements)

References 11 publications

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“…The aim of the fast steering mechanism (FSM) is to combine the closed loop capability of a long range platform while maintaining high bandwidth response of a short range actuator 4,5,6 . This design approach uses two piezoelectrically actuated motion-control platforms integrated in series 7 , Figure 2 to Figure 4.…”

Section: Dual Platform Methodology (Coarse and Fine Actuation Plamentioning

confidence: 99%

Steering Mirror Design and Dynamic Controls for a Dual-actuation Platform Using High-strain Actuators

Woody

Smith

2005

46th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference

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This manuscript discusses several novel design approaches to enhance dynamic precision of electro-mechanical positioning systems. In particular, a detailed development program for fast steering mirrors is addressed and various unique metrology and motion control strategies are presented. In general, material developments are continually advancing lightweight mirror structures such as the implementation of silicon carbide (SIC) materials to provide higher mechanical bandwidth response. Additionally, electro-mechanical actuators must continue to advance in conjunction with the mirror technologies in order meet stringent performance specifications (i.e. power requirements, weight, and precision dynamic response). The technologies developed through this development effort include; ultra-high strain piezoelectric actuators for enhanced motion control performance, a novel mechanism design employing a dual actuation platform to provide high bandwidth response and long-range, high-precision capability, innovative controller methodologies for the series coarse/fine system and active attenuation of dynamic reaction forces, integration of energy absorbing foams to enhance dynamic control, and real-time precision digital controllers.

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Section: Dual Platform Methodology (Coarse and Fine Actuation Plamentioning

confidence: 99%

Steering Mirror Design and Dynamic Controls for a Dual-actuation Platform Using High-strain Actuators

Woody

Smith

2005

46th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference

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“…Over the past decade hybrid actuation systems for microscale motion using voice coils and PZT actuators have been implemented for the hard disk drive applications [11,12]. These strategies were applied to provide a coarse motion (using the voice coils) coupled with the high frequency response of the PZT actuator.…”

Section: Introductionmentioning

confidence: 99%

Design and performance of a dual drive system for tip-tilt angular control of a 300mm diameter mirror

Woody

Smith

2006

Mechatronics

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“…Dual-stage actuator (DSA) servo systems typically consist of a coarse actuator and a fine actuator connected in series to provide long travel range, high positioning accuracy and fast response. The industrial applications include the dualstage hard disk drive (HDD) actuator [1], the dual-stage XY positioning tables [2], and so on. The control design for the DSA is a challenging task because 1) The DSA system is a dual-input single-output (DISO) system, which means that for a given desired trajectory, inputs to the two actuators are not unique.…”

Section: Introductionmentioning

confidence: 99%

Two-degree-of-freedom control of a dual-stage actuator positioning system for short-span tracking

Zheng

2009

2009 American Control Conference

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This paper presents a new two-degree-of-freedom (2DOF) control design method for a dual-stage actuator (DSA) positioning system consisting of a linear motor (LM) and a piezo actuator (PA). The 2DOF controller is proposed to achieve disturbance rejection and short-span tracking in the PA range and is designed using the doubly coprime factorization (DCF) approach, with which the closed-loop transfer function is expressed explicitly in terms of design parameters. This greatly simplifies the optimization of design parameters in meeting desired specifications. We further study how to use the design parameters to deal with specific problems in the DSA, i.e., control allocation and trajectory planning. Experimental results demonstrate the practical implementation of the DSA control system and verify its effectiveness for step tracking and disturbance rejection. J. Zheng and M. Fu are with the School of Electrical Engineering and

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Robust controller design for a dual-stage positioning system

Cited by 14 publications

References 11 publications

Steering Mirror Design and Dynamic Controls for a Dual-actuation Platform Using High-strain Actuators

Steering Mirror Design and Dynamic Controls for a Dual-actuation Platform Using High-strain Actuators

Design and performance of a dual drive system for tip-tilt angular control of a 300mm diameter mirror

Two-degree-of-freedom control of a dual-stage actuator positioning system for short-span tracking

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