Abstract:White Light Scanning Interference (WLSI) microscopes provide an accurate surface topography of engineered surfaces. However, the measurement accuracy is substantially reduced in surfaces with low reflectivity regions or high roughness, like a surface affected by corrosion. An alternative technique called Shape from Focus (SFF) takes advantage of the surface texture to recover the 3D surface by using a focus metric through a vertical scan. In this work, we propose a technique called SFF-WLSI, which consists in … Show more
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