Risk management exercise in a wafer fab utilizing dynamic simulation

McCay, Tawnee; DePinto, G.

doi:10.1109/asmc.1998.731464

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

DOI: 10.1109/asmc.1998.731464

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Risk management exercise in a wafer fab utilizing dynamic simulation

Tawnee McCay

G. DePinto²

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Risk management exercise in a wafer fab utilizing dynamic simulation

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