Abstract:A versatile experimental facility air insulated high current medium energy 200 kV Ion Accelerator, with the terminal voltage in the range of 30-200 kV has been running successfully at Ion Beam Centre, KUK for carry out multifarious experiments in material science and surface physics. This system offers single charge state, switching magnet with five exit ports and large area irradiation/implantation using hollow cathode ion source. Ion beam induced structures on the surfaces of semiconductors have potential ap… Show more
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