2002
DOI: 10.1134/1.1481927
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Rietveld analysis of X-ray diffraction pattern from β-Ta2O5 oxide

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Cited by 103 publications
(85 citation statements)
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“…1, where each RDF is the average of at least 10 RDFs from separate diffraction patterns collected from different locations in each coating. It should be noted that the first major peak in the RDF at around 2Å corresponds well to Ta-O and Ti-O distances in many tantalum or titanium oxides [19][20][21]. The second major peak was shown in previous work [13] The correlation between the dependence of mechanical loss and metal-oxygen distances (first peak position) on titanium content is also illustrated in Fig.…”
Section: Correlations Between Structural Parameters and Mechanical Lomentioning
confidence: 69%
“…1, where each RDF is the average of at least 10 RDFs from separate diffraction patterns collected from different locations in each coating. It should be noted that the first major peak in the RDF at around 2Å corresponds well to Ta-O and Ti-O distances in many tantalum or titanium oxides [19][20][21]. The second major peak was shown in previous work [13] The correlation between the dependence of mechanical loss and metal-oxygen distances (first peak position) on titanium content is also illustrated in Fig.…”
Section: Correlations Between Structural Parameters and Mechanical Lomentioning
confidence: 69%
“…In these studies, the low-temperature Ta 2 O 5 phase was typically modeled by high-symmetry structural models, such as the orthorhombic β model [24], or the hexagonal δ model [15] (See Fig. 1).…”
mentioning
confidence: 99%
“…There is also no similarity to the structure of, e.g., any known oxide or hydride. Ta 2 O 5 has two low-temperature phases, b and d. The b-phase has an orthorhombic structure with a = 0.6217 nm, b = 0.3677 nm, and c = 0.7794 nm [49]. The d-phase has a hexagonal structure with a = 0.7191 nm and c = 0.3831 nm [50].…”
Section: Discussionmentioning
confidence: 97%