Abstract. The electron beam processed surface textures on a Ti-6Al-4V ally and a Ti-4Al-1.5Mn alloy were examined by using advanced optical microscopy for surface morphology analysis and near-surface microstructure observation. It showed that the as-resulted non-smooth surface was characterized by parallel ridges and grooves, with height and spacing closely related to processing parameters. The ridges displayed successive scale shaped features while the valley of grooves presented V shaped ripples. Based on a comprehensive observation, the formation mechanisms of such electron beam processed surface textures were discussed. In addition, the near-surface region of electron beam processed titanium alloys were characterized by fusion zone, heat affected zone and base metal from the outermost surface to the underlying base metal. The fusion zone was dominated by martensite phase generated in a high cooling rate. A heat affect zone was sandwiched between fusion zone and the underlying base metal, with different microstructural features compared to both fusion zone and base metal. The microstructure gradient is closely related to the heat distribution from the high energy electron beam.