A detailed investigation concerning the atomic structure of Cr 2 O 3 and Pd/Cr 2 O 3 ultrathin films deposited on a Ag(111) single crystal is presented. The films were prepared by MBE (molecular beam epitaxy) and characterized in situ by LEED (low energy electron diffraction), XPS (X-ray photoelectron spectroscopy), and XPD (X-ray photoelectron diffraction). Evidences of rotated domains and an oxygen-terminated Cr 2 O 3 /Ag(111) surface were observed, along with significant contractions of the oxide's outermost interlayer distances. The deposition of Pd atoms on the Cr 2 O 3 surface formed a four-monolayer film, fcc packed and oriented in the [111] direction, which presented changes in monolayer spacing and lateral atomic distance compared to the expected values for bulk Pd. The observed surface structure may shed light on new physical properties such as the induced magnetic ordering in Pd atoms.