RGTO: a new technique for preparing SnO/sub 2/ sputtered thin film as gas sensors

Sberveglieri, Veronica; Faglia, G.; Groppelli, S.; Nelli, P.

doi:10.1109/sensor.1991.148829

Cited by 16 publications

(24 citation statements)

References 6 publications

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“…The bright-field TEM image in Figure 5a shows a complete reconstruction of the SnO structure and extended Moire-fringes indicate overlapping lattice of differently oriented SnO grains. However, the SAED patterns (not shown) are identical to It is worth noting, that these sphere-like structure corresponds to the first stages of oxide film preparation by rheotaxial growth and thermal oxidation [7,8], where metallic tin is deposited to form large droplets and subsequently oxidized to result in an oxide film with a high surface-tovolume ratio. These features are even more pronounced if the deposition is carried out with less O 2 (Figure 6b).…”

Section: Preparation Of Sno Thin Film Model Catalystsmentioning

confidence: 75%

“…As these applications strongly depend on the structure and morphology of the SnO 2 samples, special attention has been paid to the development of reproducible preparation methods of a variety of SnO 2 samples, especially ordered thin films suitable for (high-resolution) transmission electron microscopy HR(TEM) characterization. These methods include sputtering, spray pyrolysis, electron-beam evaporation, chemical vapour deposition or rheotaxial growth and thermal oxidation, among others [3][4][5][6][7]. A concise discussion of different preparation techniques for thin films has been outlined by Sberveglieri et al [8].…”

Section: Introductionmentioning

confidence: 99%

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Preparation and structural characterization of SnO2 and GeO2 methanol steam reforming thin film model catalysts by (HR)TEM

Lorenz

Zhao

Turner

et al. 2010

Materials Chemistry and Physics

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Structure, morphology and composition of different tin oxide and germanium oxide thin film catalysts for the methanol steam reforming (MSR) reaction have been studied by a combination of (High-resolution) Transmission Electron Microscopy, Selected Area Electron Diffraction, Darkfield imaging and Electron Energy-Loss Spectroscopy. Deposition of the thin films on NaCl(001) cleavage faces has been carried out by thermal evaporation of the respective SnO2 and GeO2 powders in varying oxygen partial pressures and at different substrate temperatures. Preparation of tin oxide films in high oxygen pressures (10 -3 mbar) exclusively resulted in SnO phases, at and above 473 K substrate temperature epitaxial growth of SnO on NaCl(001) leads to well-ordered films. For lower oxygen partial pressures (10 -4 -10 -5 mbar), mixtures of SnO and β-Sn are obtained. Well-ordered SnO2 films, as verified by electron diffraction patterns and energy loss spectra, are only obtained after post-oxidation of SnO films at temperatures T ≥ 673 K in 1 bar O2. Preparation of GeOx films inevitably results in amorphous films with a composition close to GeO2, which cannot be crystallized by annealing treatments in oxygen or hydrogen at temperatures comparable to SnO/SnO2. Similarities and differences to neighbouring oxides relevant for selective MSR in the third group of the periodic system (In2O3 and Ga2O3) are also discussed with the aim of cross-correlation in formation of nanomaterials, and ultimately, also catalytic properties.

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Section: Preparation Of Sno Thin Film Model Catalystsmentioning

confidence: 75%

Section: Introductionmentioning

confidence: 99%

Preparation and structural characterization of SnO2 and GeO2 methanol steam reforming thin film model catalysts by (HR)TEM

Lorenz

Zhao

Turner

et al. 2010

Materials Chemistry and Physics

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“…Verschiedene Herstellungsverfahren bieten eine begrenzte Kontrolle über die Kornmorphologien bei der Abscheidung oder beim anschließenden Sintern/Tempern. Methoden wie Spraypyrolyse, [26] Laserstrahlverdampfen [75] und Sputtern [28] …”

Section: Poröse Filmeunclassified

“…B. ein Nachtemper-/Oxidationsschritt bei wenigstens 570 8C erforderlich. [28] Wie bei der Spraypyrolyse beobachtet wurde, setzt die Synthese hochleistungsfähiger Sensorfilme außerdem eine Optimierung dieser Prozessbedingungen voraus [26] und ist auch meist auf einen schmalen Temperatur-und Druckbereich beschränkt. Tatsächlich fördern ein niedriger Druck die Verdichtung des Films und eine hohe Substrattemperatur das Kornwachstum.…”

Section: Prozessdesignunclassified

“…[21][22][23][24][25][26][27] Durch eine Miniaturisierung in den Nanobereich hinein und die Zugabe geeigneter Dotierstoffe konnten die Sensoreigenschaften dieser Materialien, insbesondere jene von SnO 2 , verbessert werden. [3,26,28] [10] Adsorption und Desorption des Analyten auf der (ca. 400 8C) heißen Metalloxidoberfläche verändern den Widerstand des Films schlagartig und ermöglichen die quantitative Detektion.…”

Section: Introductionunclassified

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Halbleitergassensoren: Trockensynthese und Anwendung

2010

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Seit der Entwicklung erster Chemiresistorgassensoren auf Metalloxidbasis wurden Wandler mit neuartigen Eigenschaften durch Nass‐ und Trockenabscheidung erzeugt. Der Direktaufbau nanostrukturierter Filme aus der Gasphase verspricht dabei eine einfache Herstellung und Steuerbarkeit, und mit geeigneten Synthese‐ und Abscheidungsmethoden können nm‐ bis μm‐dicke Filme hergestellt werden. Dichte Strukturen werden durch chemische oder Dampfabscheidungsverfahren unter kontrollierten Bedingungen erzeugt, Nanopartikelfilme durch Abscheidung mono‐ oder polydisperser, aggregierter oder agglomerierter Nanopartikel aus einem Gas. Durch schlagartiges Abkühlen während der Synthese lassen sich neuartige Materialien in Nichtgleichgewichts‐ oder substöchiometrischen Zuständen einfangen. Dieser Aufsatz beschreibt die gängigsten Verfahren für die Herstellung von Metalloxid‐Halbleiterdetektoren für chemische Gassensoren. Außerdem wird die Synthese hochporöser Filme mit neuentwickelten Aerosoltechniken diskutiert. Die chemischen und Struktureigenschaften werden der erhaltenen Sensorleistung gegenübergestellt.

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Semiconductor Gas Sensors: Dry Synthesis and Application

2010

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Since the development of the first chemoresistive metal oxide based gas sensors, transducers with innovative properties have been prepared by a variety of wet- and dry-deposition methods. Among these, direct assembly of nanostructured films from the gas phase promises simple fabrication and control and with the appropriate synthesis and deposition methods nm to μm thick films, can be prepared. Dense structures are achieved by tuning chemical or vapor deposition methods whereas particulate films are obtained by deposition of airborne, mono- or polydisperse, aggregated or agglomerated nanoparticles. Innovative materials in non-equilibrium or sub-stoichiometric states are captured by rapid cooling during their synthesis. This Review presents some of the most common chemical and vapor-deposition methods for the synthesis of semiconductor metal oxide based detectors for chemical gas sensors. In addition, the synthesis of highly porous films by novel aerosol methods is discussed. A direct comparison of structural and chemical properties with sensing performance is given.

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RGTO: a new technique for preparing SnO/sub 2/ sputtered thin film as gas sensors

Cited by 16 publications

References 6 publications

Preparation and structural characterization of SnO2 and GeO2 methanol steam reforming thin film model catalysts by (HR)TEM

Preparation and structural characterization of SnO2 and GeO2 methanol steam reforming thin film model catalysts by (HR)TEM

Halbleitergassensoren: Trockensynthese und Anwendung

Semiconductor Gas Sensors: Dry Synthesis and Application

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