RF sputtering of hydrocarbon polymers and their derivatives

Biederman, Hynek; Stelmashuk, V.; Холодков, И. В.; Choukourov, Andrei; Slavı́nská, D.

doi:10.1016/s0257-8972(03)00573-5

Cited by 39 publications

(20 citation statements)

References 31 publications

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“…It was found that as the surface roughness increases, the contact angle of the metallic nanorods decreases and therefore these nanostructures resulted in hydrophilic surfaces. On the other hand, many studies have focused on utilizing Radio Frequency (RF) sputtering technique to deposit Polytetrafluoroethylene (PTFE), commonly known as Teflon, on rough surfaces to get superhydrophobic surfaces [2][3][4][5][6][7][8]. It has been documented that an increase in PTFE film surface roughness increases the contact angle of water and therefore hydrophobicity without altering the surface chemistry [2,3].…”

Section: Introductionmentioning

confidence: 99%

Hydrophobic Metallic Nanorods coated with Teflon Nanopatches by Glancing Angle Deposition

2009

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Introducing a hydrophobic property to vertically aligned hydrophilic metallic nanorods was investigated experimentally and theoretically. First, platinum nanorod arrays were deposited on flat silicon substrates using a sputter Glancing Angle Deposition Technique (GLAD). Then a thin layer of Teflon (nanopatches) was partially deposited on the tips of platinum nanorod at a glancing angle of θ = 85 o as well as at normal incidence (θ = 0 o ) for different deposition times. We show that GLAD technique is capable of depositing ultrathin isolated Teflon nanopatches on selective regions of nanorod arrays due to the shadowing effect during GLAD. Contact angle measurements on Pt/Teflon nano-composite have shown contact angle values as high as 138 o , indicating a significant increase in the hydrophobicity of originally hydrophilic Pt nanostructures. Finally, a 2D simplified wetting model utilizing Cassie and Baxter theory of heterogeneous surfaces has been developed to explain the wetting behavior of Pt/Teflon nanocomposite.

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Section: Introductionmentioning

confidence: 99%

Hydrophobic Metallic Nanorods coated with Teflon Nanopatches by Glancing Angle Deposition

2009

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“…For long-time sputtering (corresponding to thicker FC films CF, CF2 and CF3 which are the most dominant radials are noticeable, as are CF4, C2F4, C2F6 and C3F8, which are the most important stable gases during sputtering [37]. These components serve as precursors to the plasma polymerization process which results in deposition of the FC film [38,39]. The surface morphology of samples measured by AFM are shown in Figure 3.…”

Section: Characterization Of Fluorocarbon (Fc) Coatingsmentioning

confidence: 99%

Significantly Reduced Secondary-Electron-Yield of Aluminum Sheet with Fluorocarbon Coating

Wang

Zhao

et al. 2018

Coatings

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In this work, the surface of Al sheet was coated with a fluorocarbon (FC) thin film by radio frequency (RF) sputtering of polytetrafluoroethylene (PTFE) to investigate the influence of dielectric coatings on the secondary electron yield (SEY) behavior of Al sheets. Atomic-force microscopy (AFM) and energy-dispersive spectroscopy (EDS) were employed to identify the surface topographies and elemental contents of the samples with FC coatings. Water contact angle (WCA) measurements were performed to characterize the surface tension as well as the polar and dispersion components of the samples' surface. The secondary electron-mission (SEE) behavior of the samples was determined by measuring the SEY coefficients in an ultra-high vacuum chamber with three electron guns. The experimental results indicated that the longer sputtering time effectively led to the increase in coating thickness and a higher ratio of F/C, as well as the continued decrease of surface tension. A quite thin FC coating of about 11.3 nm on Al sheet resulted in the value of maximum SEY (δ max ) dropping from 3.02 to 1.85. The further increase in coating thickness beneficially decreased δ max down to 1.60, however, at the cost of a ten-fold thicker coating (ca. 113 nm). It is found that increasing the coating thickness contributes to reducing SEY coefficients as well as suppressing SEE. The results are expected to guide the design of dielectric-coating for SEY reduction as well as multipactor suppression on Al.2 of 12 of a sample surface can be tailored to create triangular, rectangular and micro-porous grooves through several approaches such as laser lithography and laser and chemical etching. Parts of the primary incident electrons are trapped in the grooved structures by changing its trajectory, thus restraining SEE [9][10][11][12]. On the premise of a large depth-to-width ratio and high aspect ratio, rough surfaces with irregular structures created by artificial means also work. The surface roughness is likely to act as a blackbody or rough surface cage. Particle bombardment is an emerging and promising method to prepare rough surfaces with reduced SEY. Yang et al. [13] found that argon ion sputtering reduced the SEY of gold by eliminating contamination but also the roughing surface induced ion bombardment. An "equivalent work-function" relating the effect of contamination and surface roughness was proposed to predict SEY. Furthermore, Hu et al. [14] analyzed the influence of bombardment intensity and ion energy on the SEY of copper plates. Based on different surface topographies fabricated by ion bombardment, the optimized ion-beam parameters to achieve the lowest SEY of copper were obtained. In association with the experimental construction of rough structures, numerical simulation and dynamic calculation have developed rapidly. Theoretical research has mainly focused on building up rough-structure models, which consider the energy and incident angle of primary electrons. Chang et al. [15] applied particle-in-cell simulation to analyze the chang...

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“…ein material, welches sehr häufig in diesem Zusammenhang in der Literatur beschrieben wird, ist das Polytetrafluorethylen (PtFe) [5,6]. Weitere aus der Literatur bekannte organische materialien, welche gesputtert werden können, sind Polyimid (Pi) [7], Polypropylen (PP) [8] und Polyethylen (Pe) [9].…”

Section: Sputterdepositionunclassified

Herstellung von Polymer‐ und Polymer‐Metalloxid‐Kompositschichten

Neubert

Vergöhl

2013

Vak Forsch Prax

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Organische materialien werden bislang kaum in optischen interferenzschichten eingesetzt. ursächlich hierfür sind neben ihrer relativ geringen mechanischen Beständigkeit die oft komplexeren technologien zur herstellung dünner organischer schichten und die im Vergleich zu oxidischen materialien mangelhafteren optischen eigenschaften. dennoch bieten einige organische materialien spezielle eigenschaften, welche sie für den einsatz in optischen schichtsystemen durchaus interessant machen. Zwar sind diese schichten relativ weich, jedoch können sie durch ihre hohe mechanische Flexibilität mechanische spannungen in schichtsystemen abbauen. einige organische materialien zeigen darüber hinaus spezielle optische effekte wie Fluoreszenz oder intensive Farben, welche in optischen schichtsystemen genutzt werden können. hydrophile und hydrophobe organische deckschichten können zudem das Verschmutzungsverhalten von optischen schichtsystemen positiv beeinflussen. Aus diesem Grund stellen wir in diesem Artikel eine reihe von Beschichtungstechniken für organische substanzen aus der Gasphase vor und berichten über einige grundlegende optische und mechanische schichteigenschaften sowie über wichtige Prozesscharakteristika. ZusAmmenFAssunGAbbildung 1: Bruchdehnungswerte einiger Oxidschichten mit verschiedenen Schichtdicken, hergestellt mit verschiedenen Vakuumbeschichtungsverfahren

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RF sputtering of hydrocarbon polymers and their derivatives

Cited by 39 publications

References 31 publications

Hydrophobic Metallic Nanorods coated with Teflon Nanopatches by Glancing Angle Deposition

Hydrophobic Metallic Nanorods coated with Teflon Nanopatches by Glancing Angle Deposition

Significantly Reduced Secondary-Electron-Yield of Aluminum Sheet with Fluorocarbon Coating

Herstellung von Polymer‐ und Polymer‐Metalloxid‐Kompositschichten

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