RF sputtering deposited a-IGZO films for LCD alignment layer application

Wu, G.M.; Liu, C.Y.; Sahoo, Anup Kumar

doi:10.1016/j.apsusc.2015.04.153

Cited by 33 publications

(9 citation statements)

References 35 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Sonuçlara baktığımızda In3d5, O1s, Zn2p3 ve Ga2p3 elementleri sırasıyla 445 eV, 531 eV, 1022,78 eV ve 1119 eV bağlanma enerjilerinde tespit edilmiştir. Bu bağlanma enerjilerindeki metal elementlerinin oksit formunda olduğunu söyleyebiliriz [26][27][28].…”

Section: Elementsel Analizunclassified

Synthesis and Characterization of IGZO Nanoparticles Using Flame Spray Pyrolysis Method

Yıldırım

2021

Bitlis Eren Üniversitesi Fen Bilimleri Dergisi

View full text Add to dashboard Cite

ÖzYüksek elektron mobilitesi, düşük eşik gerilimi ve kaplama sonrası şeffaf özellik gösteren İndiyum Galyum Çinko Oksit (InGaZnO4, IGZO) malzemesi ekran teknolojilerinde artan bir ivmeyle kullanılmaktadır. Bu çalışmada, IGZO nanopartikülleri alev püskürtme piroliz yöntemi kullanılarak tek aşamada başarıyla sentezlendi. Üretilen nanopartiküllerin faz ve element analizleri, sırasıyla X-ışını kırınımı (XRD) ve X-ışını fotoelektron spektroskopisi (XPS) ölçümleriyle yapıldı. Isıl işlem öncesi XRD analizinde amorf yapı gözlemlenirken, 1200 o C de yapılan kalsinasyon sonucu rombohedral kristalin InGaZnO4 yapısı tespit edildi. Elementel analiz sonucunda yapı içerisinde In, Ga, Zn ve O elementlerinin varlığı kanıtlandı. Yüzey morfolojisi ve partikül büyüklüğü taramalı elektron mikroskobu (SEM) kullanılarak tespit edilirken, nanopartiküllerin parçacık boyutlarının <100 nm den küçük ve yarı küresel olduğu bulundu. UV uyarma altında nanopartiküllerin fotolüminesans ve optik bozulma zamanı karakterizasyonları incelenmiş ve 380 nm uyarma altında IGZO nanopartikülleri, 510 nm ve 570 nm civarında emisyon sergilemiştir. Bu uyarma ve emisyon altında yapılan optik bozulma süresi iki üstelli ve 32,36 µs olarak hesaplanmıştır.

show abstract

Section: Elementsel Analizunclassified

Synthesis and Characterization of IGZO Nanoparticles Using Flame Spray Pyrolysis Method

Yıldırım

2021

Bitlis Eren Üniversitesi Fen Bilimleri Dergisi

View full text Add to dashboard Cite

show abstract

“…Additionally, ITO thin films can sense ethanol [ 41 , 42 ] and water vapors [ 43 ]. Furthermore, ITO-coated glass substrates were used in liquid crystals display (LCD) [ 44 , 45 , 46 , 47 ] and polymer dispersed liquid crystals device fabrication [ 48 , 49 , 50 ]. The suitable material for a certain application can be achieved by changing several parameters involved in the preparation process as follows: the deposition technique [ 16 ], the metal doping level [ 51 ], the pre- and final annealing temperatures [ 19 ], and the film thickness [ 22 ].…”

Section: Introductionmentioning

confidence: 99%

Structural, Optical, and Sensing Properties of Nb-Doped ITO Thin Films Deposited by the Sol–Gel Method

Nicolescu

Mitrea

Hornoiu

et al. 2022

Gels

View full text Add to dashboard Cite

The aim of the present study was the development of Nb-doped ITO thin films for carbon monoxide (CO) sensing applications. The detection of CO is imperious because of its high toxicity, with long-term exposure having a negative impact on human health. Using a feasible sol–gel method, the doped ITO thin films were prepared at room temperature and deposited onto various substrates (Si, SiO2/glass, and glass). The structural, morphological, and optical characterization was performed by the following techniques: X-ray diffractometry (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and UV/Vis/NIR spectroscopic ellipsometry (SE). The analysis revealed a crystalline structure and a low surface roughness of the doped ITO-based thin films. XTEM analysis (cross-sectional transmission electron microscopy) showed that the film has crystallites of the order of 5–10 nm and relatively large pores (around 3–5 nm in diameter). A transmittance value of 80% in the visible region and an optical band-gap energy of around 3.7 eV were found for dip-coated ITO/Nb films on SiO2/glass and glass supports. The EDX measurements proved the presence of Nb in the ITO film in a molar ratio of 3.7%, close to the intended one (4%). Gas testing measurements were carried out on the ITO undoped and doped thin films deposited on glass substrate. The presence of Nb in the ITO matrix increases the electrical signal and the sensitivity to CO detection, leading to the highest response for 2000 ppm CO concentration at working temperature of 300 °C.

show abstract

“…There have been many studies on the alignment layer treatment for uniform LC alignment, including the rubbing method, 14,15 oblique evaporation method, 16 the sputtering method, 17 and the photo-alignment method. 18 Among these, the rubbing method has conventionally been used for a long time in industrial processes.…”

Section: Introductionmentioning

confidence: 99%

Well‐ordered nanostructured organic/inorganic hybrid thin film construction via UV nanoimprint lithography applicable to liquid crystal systems

Lee

Won

Kim

et al. 2022

J of Applied Polymer Sci

View full text Add to dashboard Cite

In this study, a well‐ordered unidirectional nanostructure was successfully imprinted on a UV curable polymer/indium oxide hybrid film using UV nanoimprint lithography (NIL). The surface morphologies of the hybrid films were analyzed by atomic force microscopy (AFM), and the uniform nanostructure with a period of 820 nm and height of 30 nm was observed on a 6 min UV‐irradiated film by line profile from AFM. The chemical modification of the films according to UV irradiation time was analyzed by X‐ray photoelectron spectroscopy. The nanopatterned hybrid film was applied to the liquid crystal (LC) alignment layer and the polarized optical microscopy and pretilt angle analysis demonstrated the highly uniform and homogeneous LC alignment state. The unidirectional nanostructure guided the LCs orientation and the aligned surface anisotropy which induces the uniform LC alignment. The hybrid film chemical affinity was analyzed by contact angle measurement, and the increased surface energy after UV irradiation contributed to the homogeneous LC alignment. Therefore, various organic/inorganic hybrid films can be used for nanostructure construction via UV NIL, and it has a high potential for application in diverse LC systems.

show abstract

RF sputtering deposited a-IGZO films for LCD alignment layer application

Cited by 33 publications

References 35 publications

Synthesis and Characterization of IGZO Nanoparticles Using Flame Spray Pyrolysis Method

Synthesis and Characterization of IGZO Nanoparticles Using Flame Spray Pyrolysis Method

Structural, Optical, and Sensing Properties of Nb-Doped ITO Thin Films Deposited by the Sol–Gel Method

Well‐ordered nanostructured organic/inorganic hybrid thin film construction via UV nanoimprint lithography applicable to liquid crystal systems

Contact Info

Product

Resources

About