1999
DOI: 10.1016/s0169-4332(99)00137-3
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RF-plasma treatments of surface-conductive alkali-lead silicate glass and microchannel plate devices

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Cited by 4 publications
(4 citation statements)
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“…Oxygen plasma (13.85 MHz RF discharge) and nitrogen microwave plasma (2.45 GHz discharge), both at a pressure of 30 Pa, were used at powers of 200 and 2000 W, respectively. Plasma exposure times ranged from 60 to 120 s. Although numerous papers refer to the low‐pressure plasma treatment of glass substrates, this procedure often appears to be impractical, since the density of the active species is rather low and because the maintenance of low‐pressure conditions is expensive and complex, particularly for inline processing.…”
Section: Challenges In Plasma Sciencementioning
confidence: 99%
See 1 more Smart Citation
“…Oxygen plasma (13.85 MHz RF discharge) and nitrogen microwave plasma (2.45 GHz discharge), both at a pressure of 30 Pa, were used at powers of 200 and 2000 W, respectively. Plasma exposure times ranged from 60 to 120 s. Although numerous papers refer to the low‐pressure plasma treatment of glass substrates, this procedure often appears to be impractical, since the density of the active species is rather low and because the maintenance of low‐pressure conditions is expensive and complex, particularly for inline processing.…”
Section: Challenges In Plasma Sciencementioning
confidence: 99%
“…Most of the work on glass surface cleaning by plasmas was done with electrical discharges generated at low pressures of between 10 −3 and 10 3 Pa in oxygen . Many other papers refer to the low‐pressure plasma treatment of glass substrates, but this procedure appears to be impractical, since the low density of the active species force longer exposure times of several minutes. On the other hand, one important advantage of low‐pressure O 2 plasma is that the dominant plasmachemical processes are relatively well understood, since these plasmas have been used extensively in the semiconductor industry.…”
Section: Challenges In Plasma Sciencementioning
confidence: 99%
“…In work [9] channels were purified of alkaline contaminations with ion-plasma treatment. But after several weeks-of-storage alkaline cations were exposed at the surface from the channel walls thickness with all negative consequences (increase in outgassing and noise level).…”
Section: Z:lt8nmmentioning
confidence: 99%
“…The elemental analysis showed increases in concentration for a variety of metals, including Na, Ca, and Fe (see Table 2S in the Supporting Information). Reports have shown that electrolytes inside bulk glass can be released at the surface during plasma discharges 13. For the same reason, the LTP may cause electrolytes to leak from the wall surface of the nanoESI emitter (made from borosilicate glass) into the spray solution.…”
mentioning
confidence: 99%