RF MEMs variable capacitors for tunable filters

Goldsmith, C. Franklin; Malczewski, A.; Yao, Zheng; Chen, Shea; Ehmke, J.; Hinzel, David H.

doi:10.1002/(sici)1099-047x(199907)9:4<362::aid-mmce7>3.0.co;2-h

Cited by 117 publications

(53 citation statements)

References 4 publications

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“…These resonances occur without any external force applied to the beam structure. In addition, the switching speed of the beam can be estimated by onequarter period of the mechanical primary natural frequency of the beam (Goldsmith et al 1999). This results the theoretical switching speed of 4.64 µs.…”

Section: Modal Analysismentioning

confidence: 99%

Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer

et al. 2017

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initial displacement of the proposed horizontal truss fixedfixed beam structure. Compared to the conventional doubly clamped solid beam design, the proposed beam has less sensitivity to in-plane residual stress. This makes the pull in voltage to be less affected by the stress due to the fabrication. The simulated pull-in and lift-off voltages are 30 and 25 V respectively while the estimated switching time for the beam is 4.64 μs. The overall size of the varactor is 740 μm × 653 μm. The proposed RF MEMS varactor could be integrated in reconfigurable filters, phase shifters and matching networks targeting future multi-standard wireless communication systems.

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Section: Modal Analysismentioning

confidence: 99%

Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer

et al. 2017

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“…When the driven voltage equals to 0, the switch is on, RF signal passes through the transmission line. The signal has low return loss from one terminal to another terminal on the transmission line [5]. When driven voltage is higher than 10V, the upper movable plate moves down and contact to dielectric layer.…”

Section: Figure 1 the Vertical View Of Rf-mems Switchmentioning

confidence: 99%

RF-MEMS Switch Design and Analysis with Photon Crystal Structure

Song¹,

Wu²

2015

IJCA

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In this paper, a new structured switch based on photon crystal is designed, whose structure is notable in enhancing RF system performances. Experiment demonstrates that the new structure switch is of excellent transmission characteristics relative to average structures. In the end, the switch S parameters' analysis and some design rules are given. When T=50μm, the inserting wave loss is reduced by 20%, and the signal transmission efficency can be improved greatly.

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“…Combinations of these two-state capacitors with fixed capacitors allow construction of variable capacitor structures, ref. [1]. The basic RF MEMS capacitive switch is shown in Figure 2.…”

Section: Mems Variable Capacitor Construction/ Electrical Performmentioning

confidence: 99%

“…The starting point for these calculations is given in ref. [1]. The filter of Figure 9 had a tuning range of 885 to 986 MHz, or an 11% tuning range.…”

Section: Mems Variable Capacitor Construction/ Electrical Performmentioning

confidence: 99%

RF MEMS-based tunable filters

Brank

Yao

Eberly

et al. 2001

Int J RF and Microwave Comp Aid Eng

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100

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This paper overviews the application of RF MEMS switches in tunable filters as well as circuit developments for bandpass filters covering 110 MHz to 2.8 GHz. RF MEMS have several desirable features, including small size, low power requirements, and low loss. The basic operation of Raytheon's RF MEMS capacitive membrane switch is described. An overview of the technique used to integrate the switch into a variable capacitor structure with sixteen capacitance states is provided. Variable capacitor structures are used to construct multipole lumped bandpass filter designs, each with sixteen states. Finally, measured data from two representative five-and six-pole bandpass filters are presented. Characterization data demonstrates that the insertion loss for the five-pole filter using on-chip inductors was between 6.6 and 7.3 dB, and between 3.7 and 4.2 dB for the six-pole filter using off-chip inductors.

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RF MEMs variable capacitors for tunable filters

Cited by 117 publications

References 4 publications

Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer

Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer

RF-MEMS Switch Design and Analysis with Photon Crystal Structure

RF MEMS-based tunable filters

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