Revised mathematical model for assessment of thermal characteristics developed in ultrafast pulse laser assisted nanoimprinting lithography on silicon based substrate surface

Dutta, Jaideep

doi:10.1007/s11082-023-05594-y

Opt Quant Electron

2023

DOI: 10.1007/s11082-023-05594-y

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Revised mathematical model for assessment of thermal characteristics developed in ultrafast pulse laser assisted nanoimprinting lithography on silicon based substrate surface

Jaideep Dutta

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Revised mathematical model for assessment of thermal characteristics developed in ultrafast pulse laser assisted nanoimprinting lithography on silicon based substrate surface

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References 32 publications

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