Abstract:Chemical filters based on porous media can effectively adsorb airborne molecular contaminants in electronic industry cleanrooms. In this article, the adsorption principle, adsorption model, and performance characterization and evaluation of porous media are summarized. In addition, future research directions related to porous media are proposed: (i) development of new porous media with specific functional groups and higher specific surface area, (ii) construction of a multi-scale adsorption model depending on … Show more
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