Review on Surface Polishing Methods of Optical Parts

Abstract

With the extensive application of optical parts in many high-tech fields such as high-power laser, space optics, and aerospace, the requirements for the surface quality of optical parts are also increasing, which requires not only high surface qualities but also low defects including low subsurface damage and strict wavefront errors. As an essential link in the precision and ultraprecision optical manufacturing, various surface polishing methods and techniques have always attracted researchers’ continuous study and exploration. Considering the development of optical part surface polishing technology in recent years, this study analyzes the principle and development process of typical processing methods represented by each kind of polishing technology, expounds the specific research progress of optical part surface polishing technology, including the iterative renewal of traditional technologies and the research development of new technologies, and gives examples for typical applications. Finally, the development trend of optical part surface polishing technology is prospected, which provides a reference for follow-up intensive research in optical manufacturing.

Modeling and Simulation of Removal Function for Dual-axis Wheel Polishing

“…However, a flexible polishing device can actively adapt to the change in surface curvature of an optical element, and it can obtain free-form optical elements with better surface quality. A variety of deterministic polishing techniques had been generated according to the idea of flexible polishing techniques [5]. In the 1990s, based on the theory of elastic deformation, Martin et al [6] of the University of Arizona's Stewart Observatory Large Mirror Laboratory (SOML) first developed stress disc polishing.…”

Parametric optimisation of plasma polishing process using response surface methodology

“…Nowadays, many modern optics industries require high surface quality and minimum surface defects but face challenges in producing them. Xie et al [2] reported that optical substrates with exceptional physical properties are widely used in aerospace, aviation, electronics, and other fields. There are always some defects in the final surface in conventional processes, such as lattice disturbance, surface defects, dimensional inaccuracy, micro-cracks, etc.…”