Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

Abstract

A comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.

Fungal Mycelium Conversion into Ultrananocrystalline Diamond via Microwave Plasma Pyrolysis

“…35 However, despite the superior properties of diamond and diamond systems, they are yet to achieve full adoption across technology sectors as the material of choice for modern applications due in part to the difficulty of economically growing and manipulating them at industrial scales. 34 The findings reported here were discovered while conducting research into plasma processing of hemp to investigate their application into battery electrodes for implantable medical devices such as defibrillators/pacemakers. The results described in this article should be taken as part of an emerging alternative manufacturing methodology, taking advantage of the potential of natural systems to efficiently produce diamond-based nanomaterials and nanostructures with useful attributes capable of replacing existing nonrenewable technologies or creating entirely new ones.…”

Scanning Deposition Method for Large-Area Diamond Film Synthesis Using Multiple Microwave Plasma Sources

“…Therefore, diamonds are widely used not only for their value as jewelry but also in the fields of mechanical structures, processing tools, and semiconductor devices. In addition, research on their application in various fields, such as micro-electro-mechanical systems (MEMS), optics, electronic-emission devices, and sensors, is being actively conducted [1][2][3][4][5][6][7]. In particular, diamonds are being evaluated as an ideal next-generation material in semiconductor devices.…”

Diamond Structures for Tuning of the Finesse Coefficient of Photonic Devices

“…The synergy between optoelectronics and material engineering leads to solutions tailored for specific applications [ 18 ]. A great amount of attention is paid to diamond structures due to their unique properties [ 19 ], making them willingly used in the construction of sensors and elements of measuring heads [ 20 , 21 , 22 , 23 ]. Our previous research [ 24 ] presented the viability of diamond application in Fabry–Perot interferometers as reflective surfaces with increased immunity to mechanical and chemical damage, biocompatibility and prolonged lifespan.…”