Review of Superdense Glow Discharge

Frank, K.

doi:10.1007/978-1-4615-3786-1_2

Cited by 7 publications

(5 citation statements)

References 22 publications

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“…In general, maintaining the discharge becomes slightly 'easier' as the stability of the discharge increases with the depth of the bore, as is expected for a hollow-cathode glow discharge [36]. This explains the decrease in dynamic resistance observed for deeper cathode bores, even for cathodes which have the same internal surface area, as shown in figure 9.…”

Section: Glow Discharge Characteristicsmentioning

confidence: 58%

“…This is consistent with the observation that the brightest part of the hollow-cathode discharge is in the lower part of the cathode bore rather than being evenly distributed along the hollow-cathode bore. These observations bring into question whether these discharges are operating in the 'abnormal' region of the general glow discharge voltage-current (V -I ) characteristic [35,36].…”

Section: Glow Discharge Characteristicsmentioning

confidence: 99%

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Oliver

Finlayson

1998

J. Phys. D: Appl. Phys.

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The distribution profile of sputtered atoms in the region above a hollow-cathode bore is calculated using a mathematical model and the results are compared with data obtained from atomic absorption spectroscopy studies of the same sputtered metal atom distribution. The smoothing of the distribution function calculated from the model using an experimentally derived instrumental function is detailed. The correlation between the calculated distribution profile and two reconstructed data sets is presented and this is related to experimental studies of the distribution profile. Details of the voltage-current characteristics of the sputtering cells for a number of different hollow-cathode bore geometries are also presented. These and the observed variation in sputtering damage along the length of the various hollow-cathode bores are shown to be related to the discharge properties exhibited by the sputtering cells used in these investigations.

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Section: Glow Discharge Characteristicsmentioning

confidence: 58%

Section: Glow Discharge Characteristicsmentioning

confidence: 99%

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Oliver

Finlayson

1998

J. Phys. D: Appl. Phys.

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“…Most of the potential drop occurring between the anode and cathode occurs in the spatially microscopic sheath or cathode dark space. The field in the remainder of the discharge (negative glow region, Faraday dark space and positive column) is slowly varying, and any variations can essentially be neglected [15,16]. The negative glow region is contained within the bore of the hollow cathode, and is where most of the excitation of the sputtered copper atoms occurs, thus concentrating the signal intensity of the spectral emission lines.…”

Section: Methodsmentioning

confidence: 99%

Reconstruction of sputtered copper atom densities in a hollow-cathode glow discharge lamp

Oliver

Finlayson

1997

J. Phys. D: Appl. Phys.

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Atomic absorption spectrometry (AAS) is used to probe the distribution of sputtered copper atoms in the body of a discharge cell specially constructed to reproduce the environment of a hollow-cathode lamp. The use of a reconstruction in the treatment of data obtained from absorption measurements is detailed and demonstrated. Sample data from sputtering cells filled with argon and neon are evaluated. The resulting backprojection data set enables a numerical density of atoms at the top of the cathode bore to be determined. To illustrate the effectiveness of the technique, this value is calculated for data taken from copper cathodes operating in sputtering cells filled with argon and neon. Comment is made upon the usefulness and accuracy of the method.

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“…Other pioneering works also reported high current densities that have been called "superdense" glow discharges [29] and that have been obtained with hollow cathode geometries [30]. Average current densities range from 5 to 1000 A • cm −2 [2,31], but only for very short pulses, of the order of μs.…”

Section: Experimental Diagnostics On Molybdenummentioning

confidence: 99%

Hyper power impulse magnetron – HyPIM – glow discharge

Morel

Rozier

Minea

2022

EPL

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Glow discharges are known to be limited for running at high currents (< 0.1 A · cm−2). Magnetically enhanced plasmas could overcome this limitation, typically for the magnetron operated in pulsed mode during a few 100μs. Hence, the current density could be increased by two decades, but it still stays below 10 A · cm−2. Here we report on a long (∼1 ms) pulsed operation of magnetrons, while preserving the glow mode, for current densities exceeding at least 3 times the highest current density reported for high power pulsed magnetrons. Even if the density of energy surpasses 7 J · cm−2, no arc transition was observed. Three target materials have been successfully tested: carbon (C), molybdenum (Mo) and tungsten (W) in helium atmosphere, from 5 to 30 Pa. Two key parameters are required to reach the Hyper Power Impulse Magnetron (HyPIM) glow mode: i) the accurate control of the maximum voltage during the pulse and ii) the use of the pre-ionization. Operating conditions of HyPIM will be presented and compared to other discharges.

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Review of Superdense Glow Discharge

Cited by 7 publications

References 22 publications

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Reconstruction of sputtered copper atom densities in a hollow-cathode glow discharge lamp

Hyper power impulse magnetron – HyPIM – glow discharge

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