Review of silicon photonics: history and recent advances

Ye, Winnie N.; Xiong, Yule

doi:10.1080/09500340.2013.839836

Cited by 81 publications

(35 citation statements)

References 119 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The SOI waveguides investigated in this work consisted of a silicon core with height of 220 nm and width of 500 nm and 1000 nm [13]. The gratings were defined as a sinusoidal perturbation on the waveguide sidewalls (figure 1).…”

Section: A Design and Fabricationmentioning

confidence: 99%

Polarisation selective Bragg filters on silicon-on-insulator

Klitis

Cantarella

Strain

et al. 2015

2015 11th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)

View full text Add to dashboard Cite

show abstract

Section: A Design and Fabricationmentioning

confidence: 99%

Polarisation selective Bragg filters on silicon-on-insulator

Klitis

Cantarella

Strain

et al. 2015

2015 11th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)

View full text Add to dashboard Cite

show abstract

“…The advances in polymer-based photonics achieved during the last decade open the route towards more versatile application scenarios in distributed sensing and analytics based on artificial skin-like sensor networks, see Figure 1 for a possible implementation. Compared to their glass or silicon-based counterparts polymer photonic devices feature several compelling advantages such as cost and resource efficiency, biocompatibility and flexibility [1,2]. Also, on the material side, the optical properties of the underlying polymer species, for example, the viscosity and the refractive index can be adjusted according to the application requirements, by suitable chemical additives [3].…”

Section: Introductionmentioning

confidence: 99%

Towards fabrication and application of polymer based photonics networks and sensors

Rahlves

Rezem

Günther

et al. 2018

MOEMS and Miniaturized Systems XVII

View full text Add to dashboard Cite

Highly-functional photonic sensor networks integrated in thin polymer foils offer great potential for versatile applications in the life sciences, medicine, environmental analytics or production technology. For their realization, suitable low-cost and high-throughput production techniques need to be developed. Here, we describe work towards this goal, i.e. the fabrication of multimode polymer waveguides through a combination of thermal imprint and doctor blading. For imprint master stamp fabrication, a combined Bosch and O2 plasma etching process in silicon is utilized. We also demonstrate stamp fabrication by an additive manufacturing method, i.e. by employing maskless UV lithography, to enhance the flexibility and cost-effectiveness of our approach. We, thus, realize various all-polymer waveguide arrays, beam splitters, and grating couplers which serve as basic elements to create more complex photonic circuits. We also demonstrate polymer based transmission lines comprising semiconductor as well as organic light sources and detectors. We discuss both the integration of semiconductor light sources and detectors such as verticalcavity surface-emitting lasers (VCSEL) and photo detectors as well as organic light emitting diodes (OLEDs) and organic photo detectors. In first applications, we combine these elements to create sensor arrays for measuring temperature, strain or refractive index. We show results of various sensor types utilizing different measurement principles implemented in laboratory environments so far. For example, a waveguide array containing a linear discontinuity which serves as elongation zone for displacement, strain or tilt measurement by detecting the intensity variation of the transmitted light propagating inside the structure is presented. In future, we plan to create more powerful sensor photonics networks for reliable and robust applications in real life, e.g. for point-of-care testing or production monitoring.

show abstract

“…Due to this low mismatch (<1%), the epitaxial growth of YSZ at the interface with sapphire should be driven by this orientation. Then, from the two in-plane orientations of (001) YSZ (orientations type_a and type_b), the lowest mismatch is 1.6% along [1][2][3][4][5][6][7][8][9][10] reveal the location of YSZ grains (bright color) corresponding to the different electron-diffraction patterns of Fig. 4(a).…”

Section: In-plane Orientation Of Ysz On Sapphirementioning

confidence: 99%

“…Intensive researches are currently conducted on the miniaturization of photonic devices and on the combination of photonics and electronics to decrease the power consumption and to create novel functionalities for a myriad of applications including datacom, telecom, sensing, and quantum optics, to name a few [1][2][3]. In this context, functional oxides have emerged as a promising material family to expand the functionalities of current photonic circuits thanks to their wide range of properties as multiferroicity, piezoelectricity, and optical nonlinearities [4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

High-quality crystalline yttria-stabilized-zirconia thin layer for photonic applications

Marcaud

Matzen

Alonso‐Ramos

et al. 2018

Phys. Rev. Materials

View full text Add to dashboard Cite

Functional oxides are considered as promising materials for photonic applications due to their extraordinary and various optical properties. Especially, yttria-stabilized zirconia (YSZ) has a high refractive index (∼2.15), leading to a good confinement of the optical mode in waveguides. Furthermore, YSZ can also be used as a buffer layer to expand toward a large family of oxides-based thin-films heterostructures. In this paper, we report a complete study of the structural properties of YSZ for the development of integrated optical devices on sapphire in telecom wavelength range. The substrate preparation and the epitaxial growth using pulsed-laser deposition technique have been studied and optimized. High-quality YSZ thin films with remarkably sharp x-ray diffraction rocking curve peaks in 10 −3 • range have then been grown on sapphire (0001). It was demonstrated that a thermal annealing of sapphire substrate before the YSZ growth allowed controlling the out-of-plane orientation of the YSZ thin film. Single-mode waveguides were finally designed, fabricated, and characterized for two different main orientations of high-quality YSZ (001) and (111). Propagation loss as low as 2 dB/cm at a wavelength of 1380 nm has been demonstrated for both orientations. These results pave the way for the development of a functional oxides-based photonics platform for numerous applications including on-chip optical communications and sensing.

show abstract

Review of silicon photonics: history and recent advances

Cited by 81 publications

References 119 publications

Polarisation selective Bragg filters on silicon-on-insulator

Polarisation selective Bragg filters on silicon-on-insulator

Towards fabrication and application of polymer based photonics networks and sensors

High-quality crystalline yttria-stabilized-zirconia thin layer for photonic applications

Contact Info

Product

Resources

About