Review of Ion Engineering Center Corporation and Related Research Projects in Ion Engineering Research Institute Corporation

Takagi, Toshinori

doi:10.1016/b978-0-444-81994-9.50013-0

Cited by 1 publication

(1 citation statement)

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“…The one-dimensional divergence of a flat ion beam can be roughly estimated using the equation given in Ref. 6. When the ion beam current is 100 mA, a beam energy is 100 eV and the initial beam width is r 0 ¼ 3 cm, the beam diverges to about 500 m after 50 cm propagation from the initial position.…”

Section: Introductionmentioning

confidence: 99%

Suppression of Radial Divergence of Extremely Low Energy Ion Beam by an Electron Beam Injection to a Grounded Electrode

Hirano

Kiyama

Sakakita

et al. 2013

Jpn. J. Appl. Phys.

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Transition to a highly focused state is observed in a hydrogen ion beam extracted from an ion source using concave-shaped electrodes. The beam has a low energy (∼95 eV) and a high current (∼60 mA) with a ∼60 mm diameter. The transition is induced by electron beam injection (1 keV and up to 50 mA) to a grounded electrode of an ion source from a direction obliquely opposite to the ion beam velocity. Probably, secondary electrons emitted from the electrode play an effective role in cancelling the beam ion space charge, since they are produced in the core region of ion beam immediately after the extraction. Comparison between the cases with and without an electron beam exhibits great improvements not only in a total ion beam current reaching a target, but also in the focusing of ion beam. The sudden transition to this highly focused state, which is triggered by a low electron beam current (∼9 mA), suggests that some kind of a nonlinear process plays an essential role in this focusing.

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Section: Introductionmentioning

confidence: 99%