2022
DOI: 10.1149/2162-8777/ac6f20
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Review—Measurements of Ionizing Radiations Using Micromechanical Sensors

Abstract: We discuss several micromechanical sensor methods for utilizing technologies to detect gamma and beta radiation. The bending and resonance-frequency shifts of microcantilever sensors exhibit high sensitivity to ionizing radiation. Quartz oscillators, as well as microcantilevers coated with different materials, can aid in increasing the sensor sensitivity. Introducing MEMS technology to hydrogen-pressure sensors increased the ability of the sensors to detect low doses of radiation. Quartz tuning forks show exc… Show more

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Cited by 4 publications
(1 citation statement)
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“…In the optical domain, they are used in multiple optical applications, such as sensors and microphones [4][5][6][7][8] . From such diversified spectrum of applications, it has been evident that MEMS are useful candidates in medical, chemical, and biological fields [9][10][11] . Recent developments in MEMS technology, in particular, have completely changed trends in a variety of industries, including sports, aerospace, biomedicine, electronics, home appliances, and automotive [12][13][14][15][16] .…”
Section: Introductionmentioning
confidence: 99%
“…In the optical domain, they are used in multiple optical applications, such as sensors and microphones [4][5][6][7][8] . From such diversified spectrum of applications, it has been evident that MEMS are useful candidates in medical, chemical, and biological fields [9][10][11] . Recent developments in MEMS technology, in particular, have completely changed trends in a variety of industries, including sports, aerospace, biomedicine, electronics, home appliances, and automotive [12][13][14][15][16] .…”
Section: Introductionmentioning
confidence: 99%