2002
DOI: 10.1002/seup.200211105
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Review: Automatic Model Reduction for Transient Simulation of MEMS‐based Devices

Abstract: The rapid development of MEMS-based devices requires 3D time-dependent simulations for coupled physical domains (thermal, mechanical, electrical, etc.). This in turn requires the solution of high-dimensional ordinary differential equations (ODEs) that result from space discretization of the device. However, instead of a "brute force" approach to integrate a large system of ODEs, one can use modern mathematical methods to reduce the system's dimension. The goal of the present paper is to review them from an eng… Show more

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Cited by 84 publications
(67 citation statements)
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References 84 publications
(89 reference statements)
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“…Rational interpolation methods have been extended to bilinear [24,36,37,39,58,92,98,192] and quadratic-in-state systems [37,38,97,114]. Even though these methods have proven effective for a wide range of problem settings, they are most widely used in circuit theory, such as [23,44,90,184,195], e.g., to analyze and predict signal propagation and interference in electric circuits; in structural mechanics, such as [53,106,174,198,211], to study, e.g., vibration suppression in large structures or behavior of micro-electromechanical systems; and in (optimal) control and controller reduction, such as [11,21,126,185,215,231], e.g., in LQR/LQG control design.…”
Section: Applicability Of the Basis Computation Methodsmentioning
confidence: 99%
“…Rational interpolation methods have been extended to bilinear [24,36,37,39,58,92,98,192] and quadratic-in-state systems [37,38,97,114]. Even though these methods have proven effective for a wide range of problem settings, they are most widely used in circuit theory, such as [23,44,90,184,195], e.g., to analyze and predict signal propagation and interference in electric circuits; in structural mechanics, such as [53,106,174,198,211], to study, e.g., vibration suppression in large structures or behavior of micro-electromechanical systems; and in (optimal) control and controller reduction, such as [11,21,126,185,215,231], e.g., in LQR/LQG control design.…”
Section: Applicability Of the Basis Computation Methodsmentioning
confidence: 99%
“…(5), (6) among balanced truncation approximation, singular perturbation approximation, Hankel norm approximation, Guyan reduction and Krylov subspace methods such as Lanczos algorithm and Arnoldi process. Also there are many research works recently on proper orthogonal decomposition (7) or…”
Section: Introductionmentioning
confidence: 99%
“…It happens that in most cases the trajectory of the state vector can be well approximated by a low-dimensional subspace V, and projecting of ODEs on that subspace yields quite and accurate reduced models [1]. The goal of model order reduction is to find a new system of equations (2)…”
Section: Model Order Reduction For Second Order Systemsmentioning
confidence: 99%