Reversible electrowetting on silanized silicon nitride

Cahill, Brian; Giannitsis, A. T.; Land, Raul; Gastrock, Gunter; Pliquett, Uwe; Frense, Dieter; Min, Mart; Beckmann, D.

doi:10.1016/j.snb.2008.12.041

Cited by 23 publications

(19 citation statements)

References 34 publications

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“…Numerous applications involving the actuation of fluids at miniaturized scales are enabled by the variable wettability of contact surfaces. In electrowetting (EW), an established method for fluid manipulation, an applied electric field affects surface tension and modifies how a liquid spreads over a substrate [1][2][3][4]. With EW methods, wettability of a surface is modified without changing the chemical composition of the liquid or substrate.…”

Section: Introductionmentioning

confidence: 99%

Electrowetting Actuation of Polydisperse Nanofluid Droplets

Patacsil

Calupitan

Enriquez

et al. 2017

Advances in Materials Science and Engineering

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We present results of electrowetting experiments employing droplets formed from aqueous suspensions of Au nanoparticles. A planar electrowetting system, consisting of a Pt wire electrode and a bottom Cu electrode with an insulating silicone layer, is used to observe changes in droplet contact angle when an external electric field is applied. The equilibrium contact angle at 0 V decreases with increasing nanoparticle concentration, dropping from 100.4° for pure deionized water to 94.7° for a 0.5 μM nanofluid. Increasing the nanoparticle content also lowers the required voltage for effective actuation. With actuation at 15 V, contact angle decreases by 9% and 35% for droplets formed from pure water and a 0.5 μM nanoparticle suspension, respectively. Contact angle saturation is observed with nanofluid droplets, with the threshold voltage decreasing as nanoparticle concentration rises. Maximum droplet actuation before contact angle saturation is achieved at only 10 V for a concentration of 0.5 μM. A proposed mechanism for the enhanced electrowetting response of a nanofluid droplet involves a reduction in surface tension of the droplet as nanoparticles accumulate at the liquid-vapor interface.

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Section: Introductionmentioning

confidence: 99%

Electrowetting Actuation of Polydisperse Nanofluid Droplets

Patacsil

Calupitan

Enriquez

et al. 2017

Advances in Materials Science and Engineering

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“…The thin layers of SiO 2 that are present on the silicon nanostructures are susceptible to dielectric breakdown and charge leakage occurs across this thin oxide which leads to electrolysis. [37,44,45] The electrolysis is confirmed by the bubble formation from the substrate. Therefore, in order to avoid irreversible change in CA during electrowetting, a thin conformal high-k dielectric coating is essential.…”

Section: Resultsmentioning

confidence: 93%

“…It has potential applications in lab-on-a-chip devices, [34] liquid lenses, [35] microfluidic systems [36] and in optical displays. [37] Silicon is the most established microfabrication-compatible material, [38] and therefore fabrication of silicon superhydrophobic-based surfaces may be interesting for lab-on-a-chip microfluidic health care devices.…”

Section: Introductionmentioning

confidence: 99%

Controlled fabrication and electrowetting properties of silicon nanostructures

Rajkumar

Rajavel

Cameron

2016

Journal of Adhesion Science and Technology

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a advanced Materials and devices laboratory (aMdl), department of Physics, Bharathiar university, coimbatore, india; b asTral, lappeenranta university of Technology, Mikkeli, finland; c department of nanoscience and Technology, Bharathiar university, coimbatore, india; d cePlanT, department of Physical electronics, Masaryk university, Brno, czech republic ABSTRACT Electrowetting on dielectric is of particular interest in various applications including digital microfluidics, optics, displays and in analysis of biological samples. In this paper, Ag-assisted etching of silicon has been used to prepare superhydrophobic surfaces that may add unique properties to such devices. The porosity is controlled by controlling the size of the Ag deposited on the surface. Etching is carried out in HF/H 2 O 2 solution. From the SEM images, the small-sized Ag particles are found to produce a very porous irregular surface, while the larger Ag-sized particles deposited resulted in regular vertical nanostructures. The fabricated surface was chemically modified with fluoro alkyl silane to make it superhydrophobic. Wetting behaviour was studied by measuring the contact angle and contact angle hysteresis. The contact angle measured was greater than 150° and contact angle hysteresis was less than five. Electrowetting was studied by applying DC voltage between the droplet and silicon substrate.

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“…Hydrophobic films are very suitable as coatings for microchannels. Different hydrophobization methods have been introduced, ranging from spontaneous covalent bonding of hydrophobic self-assembles of organometallic octadecyltriclorosilanes, a process called silanization, to chemical and plasma deposition of fluoropolymers [140][141][142][143][144][145][146]. Alternatively, instead of hydrophobizing a microchannel, it is possible by introducing hydrophobic surfactant into aqueous droplets to encapsulate them into surfactant membranes.…”

Section: Coating Materialsmentioning

confidence: 99%

Microfabrication of biomedical lab-on-chip devices. A review

Giannitsis

2011

Estonian J. Eng.

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Lab-on-chip systems are a class of miniaturized analytical devices that integrate fluidics, electronics and various sensorics. They are capable of analysing biochemical liquid samples, like solutions of metabolites, macromolecules, proteins, nucleic acids, or cells and viruses. Supplementary to their measuring capabilities, the lab-on-chip devices facilitate fluidic transportation, sorting, mixing, or separation of liquid samples. A type of lab-on-chip devices, named biochip, is devoted specifically to genomic, proteomic and pharmaceutical tests. The significance of such miniaturized devices lies in their potentiality of automating laboratory procedures, which highly reduces the time of biomedical tests and laboratory work. This review summarizes numerous fabrication methods and procedures for producing lab-on-chip devices and also envisages future evolution.

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Reversible electrowetting on silanized silicon nitride

Cited by 23 publications

References 34 publications

Electrowetting Actuation of Polydisperse Nanofluid Droplets

Electrowetting Actuation of Polydisperse Nanofluid Droplets

Controlled fabrication and electrowetting properties of silicon nanostructures

Microfabrication of biomedical lab-on-chip devices. A review

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