Revealing the influence of aerosol particle state on the high-quality α-Ga2O3 single crystal thin film growth by Mist CVD epitaxy

Fan, Junliang; Xiao, Li; Qin, Yuantao; Yan, Hao; Qu, Xiaolin; Li, Zhenzhen; Gong, Hengxiang

doi:10.1016/j.mtcomm.2024.108179

Materials Today Communications

2024

DOI: 10.1016/j.mtcomm.2024.108179

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Revealing the influence of aerosol particle state on the high-quality α-Ga2O3 single crystal thin film growth by Mist CVD epitaxy

Junliang Fan,

Li Xiao,

Yuantao Qin

et al.

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Revealing the influence of aerosol particle state on the high-quality α-Ga2O3 single crystal thin film growth by Mist CVD epitaxy

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References 23 publications

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