Revealing features of different optical shaping technologies by a point diffraction interferometer

Voznesenskiy, Nikolay; Voznesenskaia, Mariia; Jha, Diwaker; Ottevaere, Heidi; Kujawińska, Małgorzata; Trusiak, Maciej; Liżewski, Kamil

doi:10.1117/12.2270116

Cited by 2 publications

(3 citation statements)

References 4 publications

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“…Components of the flat surface form like spherical aberration are explicitly small related to polishing and finishing process e.g. lapping 9 and can be regarded as being below the admissible level according to considerations discussed in the introduction and numerical data shown below in this section. In any case the calibration wavefront CW can be defined using a calibration flat mirror specially manufactured with requirement to decrease a possible rotational symmetry of its irregularity.…”

Section: Measurements With Using the Accessory Lens Da2 And Systemati...mentioning

confidence: 99%

“…The nominal form of X-ray mirrors can be measured with accuracy 0.5 nm RMS 8 either at once, if their aperture is smaller than the D7 field of view (FOV), or with subaperture stitching. The form features and technological traces of optical processing can be revealed with accuracy 0.3 -0.7 nm RMS 9 . In addition, absence of retrace error and minimization of fringe print-through error give wide opportunities to apply supplementary optics for transformation of testing beams to test variety of surfaces with reliable defining and removing the systematic error, as it will be shown below in this paper.…”

Section: Introductionmentioning

confidence: 98%

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Testing optical surface form by a precise point diffraction interferometer D7

Voznesenskiy,

Voznesenskaia

2024

Eleventh European Seminar on Precision Optics Manufacturing

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In the paper methods and results of testing optical surface form with the use of the point diffraction interferometer (PDI) D7 are presented. This interferometer can produce much higher accuracy of testing optics of various kinds than traditional interferometers, and validation of its industrial applicability is the scope of the paper. An overview and analysis of techniques making using D7 in manufacturing process easier and faster are given, the accuracy which can be achieved with common requirements of optical industry is evaluated at level of λ/150 -λ/250 PV and λ/600 -λ/1000 RMS. Measurements by subapertures for consequent stitching of subaperture wavefronts with desired overlay are considered. Conclusions followed by further perspectives of the described instrument are given.

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Section: Measurements With Using the Accessory Lens Da2 And Systemati...mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 98%

Testing optical surface form by a precise point diffraction interferometer D7

Voznesenskiy,

Voznesenskaia

2024

Eleventh European Seminar on Precision Optics Manufacturing

View full text Add to dashboard Cite

show abstract

“…Traditional interferometers, such as Fizeau interferometer and Twyman-Green interferometer, can be applied to achieve the high-precision wavefront testing in order of nanometers. The novel point-diffraction interferometer (PDI) has also been proposed to improve the testing accuracy better than sub-nanometers [5][6][7][8], and it further extends the application of interferometry in ultrahigh-precision testing. Different from traditional interferometers, PDI employs an ideal diffraction spherical wavefront from either a pinhole or optical fiber as the reference standard, rather than the standard lens, and it can achieve both high measurement accuracy and repeatability.…”

Section: Introductionmentioning

confidence: 99%

Probe misalignment calibration in fiber point-diffraction interferometer

et al. 2019

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The measuring probe integrated with multiple fiber point-diffraction sources can be applied to measure both the three-dimensional coordinates and highly accurate point-diffraction wavefront. The probe determines the achievable measurement accuracy of fiber point-diffraction interferometer (PDI), in which the fiber exit end plane is required to be parallel with the detector plane. The probe misalignment due to fabrication error could introduce significant measurement error. A high-precision method is proposed to calibrate the probe misalignment in fiber PDI, including the central positioning based on phase difference and tilt adjustment based on Zernike polynomials fitting. Both numerical simulation and experiments have been carried out to demonstrate the feasibility and accuracy of the proposed probe misalignment calibration method. The proposed method provides a feasible way to address the processing uncertainty on measuring probe in fiber PDI, and enables high-precision geometry alignment and misalignment calibration in the interferometric testing systems with case of no imaging lens.

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Revealing features of different optical shaping technologies by a point diffraction interferometer

Cited by 2 publications

References 4 publications

Testing optical surface form by a precise point diffraction interferometer D7

Testing optical surface form by a precise point diffraction interferometer D7

Probe misalignment calibration in fiber point-diffraction interferometer

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