A novel method with quaternary ammonium salts as internal additives has been applied to the mass-scale calibration of timeof-flight secondary ion mass spectrometry (TOF-SIMS). Five kinds of quaternary ammonium salts, octyltrimethylammonium bromide (C8TMA), tetradecyltrimethylammonium chloride (C14TMA), octadecyltrimethylammonium chloride (C18TMA), cetylpyridinium chloride (CPC) and benzyldimethyltetradecylammonium chloride (Bzl) were diluted with NH 3 aqueous solution and were mixed in equal quantities. The mixed solution was covered on a Si wafer and was measured by TOF-SIMS. When molecular ions of C8TMA, C14TMA, and C18TMA were used for the mass-scale calibration, the relative mass accuracy of lowmass C X H Y fragment ions indicated negative values and depended on the carbon chain length and the degree of unsaturation. This result means that the conventional mass-scale calibration with frequently employed low-mass C X H Y fragment ions leads to degradation of the mass accuracy of high-mass molecular ions. To improve the mass accuracy of molecular ions of CPC and Bzl, ions should be selected for the mass-scale calibration in the following two ways: One way is for ions to consist only of molecular ions of C8TMA, C14TMA, and C18TMA, and the other way is for ions to include one of the molecular ions: C8TMA, C14TMA, and C18TMA, along with the C X H Y fragment ions. This novel mass-scale calibration method is promising for realizing the correct identification of unknown high-mass molecular ions. Those quaternary ammonium salts are powerful candidates of internal additives.