2011
DOI: 10.1088/0022-3727/44/31/315203
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Response of an ion–ion plasma to dc biased electrodes

Abstract: HAL is a multidisciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des labora… Show more

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Cited by 17 publications
(16 citation statements)
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References 25 publications
(39 reference statements)
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“…7 The negative ion to electron density ratio (electronegativity a n À =n e ) is one of the most important parameter characterizing electronegative plasmas. [8][9][10][11][12][13][14][15][16][17][18][19][20][21] It was recently shown 21 that unmagnetized electronegative plasmas could be classified in four regimes according to a. In the lowest regime a < ffiffiffiffiffiffiffiffiffiffiffiffiffi 1=8pl p (l ¼ m e /M is the electron to ion mass ratio), the bulk plasma potential is the most positive in the system and negative ions are confined within the plasma bulk by classical positive sheaths.…”
Section: Introductionmentioning
confidence: 99%
“…7 The negative ion to electron density ratio (electronegativity a n À =n e ) is one of the most important parameter characterizing electronegative plasmas. [8][9][10][11][12][13][14][15][16][17][18][19][20][21] It was recently shown 21 that unmagnetized electronegative plasmas could be classified in four regimes according to a. In the lowest regime a < ffiffiffiffiffiffiffiffiffiffiffiffiffi 1=8pl p (l ¼ m e /M is the electron to ion mass ratio), the bulk plasma potential is the most positive in the system and negative ions are confined within the plasma bulk by classical positive sheaths.…”
Section: Introductionmentioning
confidence: 99%
“…When the electronegativity becomes high and plasma tends towards ionion plasma, the IV-characteristic becomes symmetrical [4,6].…”
Section: A Langmuir Probementioning
confidence: 99%
“…The analyzer has four plane grids and a collection plate and is 1 mm long [6]. The entrance grid G, facing the plasma, is fixed on a grounded 50 mm-diameter diaphragm with an aperture 3 mm in diameter to reduce the open area seen by the plasma (to sample the plasma).…”
Section: B Rfeamentioning
confidence: 99%
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“…[2][3][4][5] This technique of electron cooling has been used in negative ion sources for plasma fusion, 6 in the formation of ion-ion plasmas for deep trench etching 7,8 and in space propulsion thrusters. 9,10 Although magnetic filters were extensively used, most of the experiments where electron temperature was measured were performed at a mixed condition where filtering mechanism was coupled with the plasma expansion (both phenomena resulting in electron cooling). 11,12 The measurements, using Langmuir probes and gridded analysers, suffered from many limitations of the probe diagnostics associated with magnetic field, rf plasma potential, and incorrect use of the probe diagnostics that resulted in inconsistent and mutually contradictive data.…”
mentioning
confidence: 99%