Resonant reflection of a surface acoustic wave from strip waveguides

Darinskii, A.N.; Weihnacht, M.; Schmidt, H.

doi:10.1016/j.wavemoti.2013.03.005

Cited by 5 publications

(6 citation statements)

References 27 publications

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“…Note that we have already investigated the SAW scattering in various cases by FEM in combination with PML. [51][52][53][54][55][56][57][58] An analogous method is also used in ref. 59.…”

Section: Introductionmentioning

confidence: 99%

Computation of the pressure field generated by surface acoustic waves in microchannels

2016

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The high-frequency pressure induced by a surface acoustic wave in the fluid filling a microchannel is computed by solving the full scattering problem. The microchannel is fabricated inside a container attached to the top of a piezoelectric substrate where the surface wave propagates. The finite element method is used. The pressure found in this way is compared with the pressure obtained by solving boundary-value problems formulated on the basis of simplifications which have been introduced in earlier papers by other research studies. The considered example shows that the difference between the results can be significant, ranging from several tens of percent up to several times in different points inside the channel.

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“…Note that we have already investigated the SAW scattering in various cases by FEM in combination with PML. [51][52][53][54][55][56][57][58] An analogous method is also used in ref. 59.…”

Section: Introductionmentioning

confidence: 99%

Computation of the pressure field generated by surface acoustic waves in microchannels

2016

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“…The reflection and the transmission coefficients are found by the spacial Fourier transform of the displacement field on the free surface of the substrate. Our estimations yield that the error in the determination of these coefficients does not exceed 2-3% (see [3]- [8] for more detail). The resonant reflection is considered for the Z-cut of AlN (symmetry 6mm).…”

Section: Statement Of the Problemmentioning

confidence: 72%

“…These errors do not exceed 0.5%. Judging by the maximum of displacements under the strip, in all cases the resonance excitation corresponds to the maximum of the reflection coefficients (see [8]). …”

Section: Excitation Of Love-wave Waveguide Modementioning

confidence: 93%

SAW resonance excitation of acoustic strip waveguide modes

Darinskii

Weihnacht

Schmidt

2013

2013 IEEE International Ultrasonics Symposium (IUS)

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The SAW reflection from a strip (Pt, Al) deposited on a half-infinite substrate (Z-cut AlN) is numerically studied. The strip-substrate contact forms an acoustic waveguide supporting leaky modes propagating faster than SAW on the free surface of the substrate. The excitation of a leaky mode by SAW leads to a singular behavior of the reflection and the transmission coefficients. The dependence is investigated of the magnitude and the phase of these coefficients on the angle of incidence, the frequency, the width and the thickness of the strip. Two types of leaky waveguide modes are considered: Love-wave type mode and LLSAW type mode.

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“…These amplitudes are calculated, like in our earlier papers [28][29][30][31][32][33], with the help of the spacial Fourier transform by extracting the harmonic k x ¼ Àk I of the displacement u SC;z ðr; tÞ at z ¼ 0 and the harmonic k z ¼ Àk T of the displacement u SC;x ðr; tÞ at x ¼ 0, respectively. The reflection and the transmission coefficients are defined as the ratio of the normal component of the mechanical displacement of the corresponding wave to the normal component of the mechanical displacement of the incident SAW.…”

Section: Statement Of the Problemmentioning

confidence: 99%