Resonant Polysilicon Antenna for Terahertz Detection

Abstract

Resonant antennas have garnered considerable interest in terahertz and visible regimes owing to its extraordinary localized field concentration capability. In this work, we experimentally demonstrate a novel metal-free terahertz detector, which is fashioned by heavily doped polysilicon using standard CMOS process. The computational results show that the incident field can be largely enhanced within the antenna gap area at the resonance of 650 GHz. The room temperature measured results show that the responsivity and noise equivalence power of the detector integrated with the optimized antenna design is 600 V/W and 200 pW/Hz 0.5 at 650 GHz, respectively. Aided by an equivalent circuit model, theoretical analysis is carried out to elucidate that the field enhancement ratio of the resonant polysilicon antenna is comparable to gold made antenna at terahertz frequencies. Our study provides a new approach for designing a low-cost and CMOS-compatible terahertz detector characterized with strongly localized field, projecting more insights on light-matter interaction at terahertz frequencies.

Input Power and Effective Area in Terahertz Detector Measurement: A Review

“…In another report, a heavily doped resonant polysilicon antenna was proposed as a THz detector. Thus, the antenna cross-sectional area is chosen as the effective detection area where a strongly confined field is transferred to a FET detector [127]. It should be noted that the normalization of the incident THz radiation based on the physical sub-wavelength detector area would yield a higher responsivity value, due to the assumption that the THz power is focused into a such small area.…”

Crosstalk in CMOS Terahertz Detector Array With On-Chip SPR Antenna

“…SPR antenna [17], [18] has a strong local field concentration capability at terahertz frequency, the mechanism of which can be explained by the collective oscillations of the resonant electrons in the radiating part of the antenna [19]. In previous studies, we have demonstrated the feasibility of the polysilicon-based SPR antenna for CMOS THz wave detectors [20], [21]. For such a THz detector, the size of pixels is about several micrometers.…”