2022
DOI: 10.1109/tuffc.2022.3144392
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Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator

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Cited by 6 publications
(2 citation statements)
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“…73–85 The nanofabrication technologies for preparing SEIRA/SERS substrates include chemical preparation methods, photolithography, electron beam lithography, magnetron sputtering, electron beam evaporation, and more. 86–107 The widely used theory for modeling SERS/SEIRA includes perturbation theory, 108 temporal coupled-mode theory, 109,110 coupled harmonic oscillator theory, 111 and so on. As mentioned earlier, machine learning is complementary to SERS/SEIRA and offers unparalleled possibilities for solving pressing challenges related to spectral artifacts, overlapping, and huge volumes of spectral data (Fig.…”
Section: Concept Of Machine Learning Enhancing Sers and Seiramentioning
confidence: 99%
“…73–85 The nanofabrication technologies for preparing SEIRA/SERS substrates include chemical preparation methods, photolithography, electron beam lithography, magnetron sputtering, electron beam evaporation, and more. 86–107 The widely used theory for modeling SERS/SEIRA includes perturbation theory, 108 temporal coupled-mode theory, 109,110 coupled harmonic oscillator theory, 111 and so on. As mentioned earlier, machine learning is complementary to SERS/SEIRA and offers unparalleled possibilities for solving pressing challenges related to spectral artifacts, overlapping, and huge volumes of spectral data (Fig.…”
Section: Concept Of Machine Learning Enhancing Sers and Seiramentioning
confidence: 99%
“…Currently, aluminum nitride piezoelectric thin film has been proven to be an excellent candidate for the realization of ultrahighfrequency acoustic devices attributed to its outstanding electrical and mechanical performance [1][2][3]. As a core functional material in acoustic resonators and filters, the elasticity of aluminum nitride piezoelectric thin film and its correlated intrinsic properties deserve priority attention.…”
Section: Introductionmentioning
confidence: 99%