Resonant Gas Sensor and Switch Operating in Air With Metal-Organic Frameworks Coating

Jaber, Nizar; Ilyas, Saad; Shekhah, Osama; Eddaoudi, Mohamed; Younis, Mohammad I.

doi:10.1109/jmems.2018.2794546

Cited by 34 publications

(35 citation statements)

References 49 publications

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“…Bistable beams exhibit additional advantages, such as their simplicity, passive holding, low actuation energy, small footprint, large stroke with small restoring forces, and negative stiffness zone. These advantages make bistable beams suitable for an increasing number of applications at different scales, such as space applications [1], biomedical [2], energy harvesting [3,4], resonators [5], actuators [6] accelerometers [7], shock sensors [8], gas sensors [9], pressure sensors [10], flow sensors [11], grippers [12], mechanisms with large displacement and small actuation stroke [13], switches [14], relays [15], memory devices [16], logics [17], lamina emergent frustrum [18], statically-balanced mechanisms [19], soft robotics [20], constant force mechanisms [21,22], bistable positioning [23][24][25][26], and multistable devices [27][28][29][30][31][32].…”

Section: Introductionmentioning

confidence: 99%

Analytical Study of the Snap-Through and Bistability of Beams With Arbitrarily Initial Shape

Hussein

Younis

2020

Journal of Mechanisms and Robotics

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We derive the snap-through solution and the governing snapping force equations for an arbitrarily pre-shaped beam deflected under a mid-length lateral point force. The exact solution is obtained based on the classical theory of elastic beams as a superposition of the initial shape and the modes of buckling. Two kinds of solution are identified depending on the axial force level. The two solutions, bifurcation conditions, bistability conditions, and the snapping force equations are derived and discussed. The snap-through and snapping force solutions are then calculated for two common beam initial shapes, the curved (first buckling shape) and the inclined one (V-shape). In both cases, explicit expressions are obtained describing the snap-through behavior. The analytical modeling results show excellent agreement with the finite element simulations. The comparison between the two cases shows a similar snap-through behavior qualitatively, while several differences and similarities are noticed quantitatively.

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Section: Introductionmentioning

confidence: 99%

Analytical Study of the Snap-Through and Bistability of Beams With Arbitrarily Initial Shape

Hussein

Younis

2020

Journal of Mechanisms and Robotics

Self Cite

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“…The water vapor concentration is controlled by controlling the flow ratio between the bubbler line and the dry nitrogen line. The vapor concentration values are calculated following the procedure in [23]. The repeatability is demonstrated by replacing the water vapor flow with nitrogen to flush the resonator and return to the original state; this process is repeated for two cycles as shown in Fig 6a.…”

Section: Sensitivitymentioning

confidence: 99%

“…These mainly employ electrostatic actuation, which is the most common method due to the unique advantages of low power consumptions and compatibility with CMOS circuits [15,16]. Various dynamical principles have been used to enhance sensitivity, such as higher order modes of vibrations [17,18], bifurcation points, and the pull-in instability [19][20][21][22][23].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Multimode excitation of a metal organics frameworks coated microbeam for smart gas sensing and actuation

Jaber

Ilyas

Shekhah

et al. 2018

Sensors and Actuators A: Physical

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Highlights The purpose of this study to demonstrate a smart sensor that is capable of performing simultaneous sensing and actuation using a single device which reduce the device size, power requirement, and cost. The concept is based on tracking the frequency shift due to external physical stimuli in the first and third modes of vibration of an electrostatically actuated clamped-clamped microbeam. The microbeam is uniformly functionalized with metal organic frameworks (MOFs) to enhance the sensitivity and selectivity of the proposed sensor. Optimizing the resonator design to excite higher order modes will open the door for simultaneously measuring multiple physical stimuli using a single resonator, which leads to smarter generation of sensors. ABSTRACTSmart sensing systems suffer complexity requiring interface circuits, microcontrollers, switches, and actuators to detect and sense, process the signal and take a decision, and trigger an action upon demand. This increases the device footprint and boosts significantly the power required to actuate the system. Here, we present a hybrid sensor and switch device, which is capable of accurately measuring gas concentration and perform switching when the concentration exceeds specific (safe)

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“…Nano/microelectromechanical systems (N/MEMS) have demonstrated exciting capabilities and superior features for several applications, such as mass/gas sensing [1][2], energy harvesting [3][4], logic [5][6] filtering [7][8], and communications [9]. On a fundamental level, N/MEMS have enabled in-depth studies for various physical phenomena thanks to the ability to precisely and easily control various physical parameters, such as damping, stiffness, and boundary conditions.…”

Section: Introductionmentioning

confidence: 99%

Multiple internal resonances in MEMS arch resonators

et al. 2018

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Micromachined shallow arch resonant beams have attracted significant attention thanks to their rich dynamical behavior, inherent nonlinearities, and the potential to excite various internal resonances. Currently, there is a lack of comprehensive experimental studies for the various types of internal resonances in arches and particularly at the micro and nano scales. Here, we aim to investigate and identify different types of internal resonances of an initially curved beam, electrothermally actuated and electrostatically driven, by electrical characterization techniques. Upon changing the electrothermal voltage of silicon micromachined arches, the second symmetric natural frequency of an arch is adjusted to near twice, three times, and four times the fundamental natural frequency, which gives rise to 2:1, 3:1, and 4:1 autoparametric resonances between the two modes. These resonances are demonstrated experimentally. We show various frequency-response curves of the total response around the excitation frequency and highlight the contribution of each mode before, during, and after the internal resonances. Allandeviation results are also shown indicating enhanced frequency stabilization of the arch oscillation when experiencing internal resonances. These studies motivate further research in this direction to exploit internal resonances of micromachined resonators for practical applications, such as sensors and mechanical amplifier.

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Resonant Gas Sensor and Switch Operating in Air With Metal-Organic Frameworks Coating

Cited by 34 publications

References 49 publications

Analytical Study of the Snap-Through and Bistability of Beams With Arbitrarily Initial Shape

Analytical Study of the Snap-Through and Bistability of Beams With Arbitrarily Initial Shape

Multimode excitation of a metal organics frameworks coated microbeam for smart gas sensing and actuation

Multiple internal resonances in MEMS arch resonators

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