Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

Hofmann, Ulrich; Aikio, Mauri; Janes, Joachim; Senger, Frank; Stenchly, Vanessa; Hagge, J.; Quenzer, Hans-Joachim; Weiss, M.; Wantoch, Thomas von; Mallas, Christian; Wagner, Bernhard; Benecke, W.

doi:10.1117/1.jmm.13.1.011103

Cited by 41 publications

(17 citation statements)

References 17 publications

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“…6, top). Mirrors with true 360-degrees scanning range have been developed [25], where a clever 2D actuation kinematics, based on asymmetric suspensions, gives a full rotation around the axis of the incident laser beam. Two-axes (2D) MEMS micro-mirrors are also actively developed, but their main envisioned application is currently for image projectors, where a raster scanning pattern is used [26].…”

Section: B Micro-mirrors For Low-cost Lidar Scanningmentioning

confidence: 99%

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Is Consumer Electronics Redesigning Our Cars?: Challenges of Integrated Technologies for Sensing, Computing, and Storage

Pieri

Zambelli

Nannini

et al. 2018

IEEE Consumer Electron. Mag.

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The paper critically analyzes the trends and limits of integrated technologies for sensing, computing and data storage when devices and systems, originally developed for consumer electronics, are used for self-driving cars. Some hints, supported by theoretical analysis and experimental measures, are provided to overcome the issues of inertial sensors, micro-mirrors for Lidar scanners, car data/program memories and computing platforms.

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Section: B Micro-mirrors For Low-cost Lidar Scanningmentioning

confidence: 99%

“…In gimballed 2D mirrors, these problems are exacerbated. Published scanning micromirror diameters typically range from 2 mm up to 7 mm [25]. At this size, resonance frequency scale from several tens of kHz to 1 kHz or less.…”

Section: B Micro-mirrors For Low-cost Lidar Scanningmentioning

confidence: 99%

Is Consumer Electronics Redesigning Our Cars?: Challenges of Integrated Technologies for Sensing, Computing, and Storage

Pieri

Zambelli

Nannini

et al. 2018

IEEE Consumer Electron. Mag.

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show abstract

“…Among applications that need large-displacement MEMS, displays [9][10][11] and light detection and ranging (LiDAR) scanning systems 12) particularly require larger MEMS actuators because the resolution of displays and scanning systems is proportional to the performance of the MEMS mirror. The performance is expressed as the index θ OPT · D · f, where θ OPT is the optical scan angle, D is the mirror diameter, and f is the scan frequency.…”

Section: Large Mems Structuresmentioning

confidence: 99%

High-uniformity centimeter-wide Si etching method for MEMS devices with large opening elements

Okamoto

Tohyama

Inagaki

et al. 2018

Jpn. J. Appl. Phys.

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We propose a compensated mesh pattern filling method to achieve highly uniform wafer depth etching (over hundreds of microns) with a large-area opening (over centimeter). The mesh opening diameter is gradually changed between the center and the edge of a large etching area. Using such a design, the etching depth distribution depending on sidewall distance (known as the local loading effect) inversely compensates for the overcentimeter-scale etching depth distribution, known as the global or within-die(chip)-scale loading effect. Only a single DRIE with test structure patterns provides a micro-electromechanical systems (MEMS) designer with the etched depth dependence on the mesh opening size as well as on the distance from the chip edge, and the designer only has to set the opening size so as to obtain a uniform etching depth over the entire chip. This method is useful when process optimization cannot be performed, such as in the cases of using standard conditions for a foundry service and of short turn-around-time prototyping. To demonstrate, a large MEMS mirror that needed over 1 cm 2 of backside etching was successfully fabricated using as-is-provided DRIE conditions.

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“…Consequently, a mirror array or a very large single MEMS mirror setup is in the range of typically 1-to 11-mm diameter. [9][10][11][12] On the one hand, the cost factor rises directly with the active mirror area. 13 On the other hand, the requirement of a large MEMS mirror surface is a major drawback for fast and reproducible scanning.…”

Section: Introductionmentioning

confidence: 99%

Laser scanner module with large sending aperture and inherent high angular position accuracy for three-dimensional light detecting and ranging

2019

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One design of the state-of-the-art laser scanner systems in automotive applications is based on oscillating mirror modules. The requirement of a large mirror surface for eye-safe transmission beams and long measurement distances is a major drawback for fast and reproducible scanning. Tolerances of angular positioning, position sensing, and vibrational perturbations limit the position accuracy of such a mirror and, thus, the accuracy of the transmission spot position in the field of view (FoV). Our approach for a scanner module with maximum transmission beam diameter combines a microlens array with an objective lens for generating one optical telescope assembly for each angular scan position exclusively. Aperture stops define the beam positions in the FoV and avoid positioning errors caused by angle deviations of the scanner mirror. This increases the reliability of the angular position accuracy of the scanner module significantly. To minimize the shadings between adjacent scan spots in the target distance, created by beam cutoffs at the aperture stop of the objective lens, an array of optimized microwedge prisms is provided in combination with the microlens array. Therefore, we can increase the throughput of transmission power into the FoV and improve the measurement distance, especially at large scan angles. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

Cited by 41 publications

References 17 publications

Is Consumer Electronics Redesigning Our Cars?: Challenges of Integrated Technologies for Sensing, Computing, and Storage

Is Consumer Electronics Redesigning Our Cars?: Challenges of Integrated Technologies for Sensing, Computing, and Storage

High-uniformity centimeter-wide Si etching method for MEMS devices with large opening elements

Laser scanner module with large sending aperture and inherent high angular position accuracy for three-dimensional light detecting and ranging

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