Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Schwarz, Fabian; Senger, Frank; Albers, Jörg; Malaurie, Pauline; Janicke, Christian; Pohl, Leon; Heinrich, Felix; Kaden, D.; Quenzer, Hans-Joachim; Lofink, Fabian; Bahr, Andreas; Wantoch, Thomas von; Hofmann, Ulrich

doi:10.1117/12.2546035

Cited by 26 publications

(16 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…MEMS mirrors can also have limited tilt range, although recently a scan angle of 180 deg was demonstrated in a one-dimensional (1D) scanning system. 6 Additionally, optical amplification can be used to increase the scan range 7 at the cost of reducing the effective aperture of the system. Both MEMS and the larger mechanical systems are limited in their scan flexibility.…”

Section: Methods Currently In Common Usementioning

confidence: 99%

Review of lens-assisted beam steering methods

Spector

2022

J. Optical Microsystems

View full text Add to dashboard Cite

Lens-assisted beam steering (LABS) has emerged as a promising solution for compact chip-based optical beam steering for light detection and ranging (LiDAR) applications. In a LABS system, light is steered within an integrated optical chip and emitted at a desired location. This emitted light is focused out into the scene with a lens, analogous to a camera operating in reverse. LABS systems offer many advantages compared to competing technologies such as solid-state reliability, simple control, compactness, and fast random access scanning. Different methods for LABS systems are described and compared. Most LABS systems demonstrated thus far have small arrays, and therefore, only offer a relatively small number of possible beam locations. It is important to understand how these systems will scale to the much larger arrays needed for a practical LiDAR system.

show abstract

Section: Methods Currently In Common Usementioning

confidence: 99%

Review of lens-assisted beam steering methods

Spector

2022

J. Optical Microsystems

View full text Add to dashboard Cite

show abstract

“…For instance, Gu-Stoppel et al presented a single-axial resonant-driven microscanner with an optical FOV of 73.2° and a high frequency of 27 kHz [ 14 ]. Schwarz et al demonstrated a resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° [ 15 ]. Without the cross-talk problem, more stable and precise feedback control of the uniaxial MEMS mirror can be realized.…”

Section: Introductionmentioning

confidence: 99%

Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System

Qiao

Xia³

et al. 2022

Micromachines

View full text Add to dashboard Cite

MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle. A simulation was carried out to show which conditions are required to obtain different angular resolutions. The experimental results of the 0.2° × 0.62° and 0.2° × 0.15° (horizontal × vertical) angular resolutions demonstrate the feasibility of the design method to realize a reconfigurable angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system by employing MEMS mirrors with different characteristics. This study provides a reasonable potential to obtain a high and flexible angular resolution for MEMS LiDAR.

show abstract

“…In Senger et al, 14 a piezoelectric resonant driven 2D MEMS scanner with 20 mm mirror aperture was presented, resulting in a circular scan pattern at about 1445 Hz with only 0.1 deg optical scan range. In Schwarz et al, 15 a piezoelectrically driven resonant 1D MEMS mirror with an elliptical aperture of 2 mm × 4 mm and a scan frequency of about 1.5 kHz for automotive LiDAR were presented, enabling a total optical scan angle of 180 deg. Beside LiDAR, MEMS scanners 16 are also interesting for further 2D/3D measuring techniques that require fast optical scanning, e.g., for high-speed imaging of unsteady spray flows using frequency-modulated Doppler global velocimetry.…”

Section: Introductionmentioning

confidence: 99%

System integration of hybrid assembled large aperture Micro Scanner Array for fast scanning LiDAR sensors

Sandner

Grasshoff

Owe

et al. 2022

J. Optical Microsystems

View full text Add to dashboard Cite

We present the design and system integration of a hybrid MEMS scanning mirror (MSM) array developed for real-time three-dimensional imaging with a panoramic optical field of view (FOV) of 360 deg ×60 deg (horizontal × vertical). The pulsed time-of-flight light detection and ranging (LiDAR) system targets a distance measurement range of 100 m with a video-like frame rate of 10 Hz. The fast vertical scan axis is realized by a synchronous scanning MSM array with large receiver aperture. It increases the scanning rate to 3200 Hz, which is four times faster in comparison with state-of-the-art fast macroscopic polygon scanning systems used in current LiDAR systems. A hybrid assembly of frequency selected scanner elements was chosen instead of a monolithic MEMS array to guaranty high yield of MEMS fabrication and a synchronous operation of all resonant MEMS elements at 1600 Hz with large FOV of 60 deg. The hybrid MSM array consists of a separate emitting mirror for laser scanning of the target and 22 reception elements resulting in a large reception aperture of D eff ¼ 23 mm. All MSM are driven in parametric resonance to enable a fully synchronized operation of all individual MEMS scanner elements. Therefore, piezoresistive position sensors are integrated inside the MEMS chip, used for position feedback of the driving control. We focus on the MEMS system integration including the microassembly of multiple MEMS scanning elements using micromechanical self-alignment. We present technical details to meet the narrow tolerance budgets for (i) microassembly and (ii) synchronous driving of multiple MEMS scanner elements. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 International License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

show abstract

Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Cited by 26 publications

References 0 publications

Review of lens-assisted beam steering methods

Review of lens-assisted beam steering methods

Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System

System integration of hybrid assembled large aperture Micro Scanner Array for fast scanning LiDAR sensors

Contact Info

Product

Resources

About