Resonance frequency vs. magnetic field analysis for ScA1N/Si SAW resonators with magnetostrictive metalization on the nanolithographic IDTs

Boldeiu, G.; Nastase, C.; Nicoloiu, Alexandra; Florescu, A.; Zdru, I.; Vasilache, D.; Dinescu, Adrian; Müller, A.

doi:10.1109/cas56377.2022.9934338

2022 International Semiconductor Conference (CAS) 2022

DOI: 10.1109/cas56377.2022.9934338

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Resonance frequency vs. magnetic field analysis for ScA1N/Si SAW resonators with magnetostrictive metalization on the nanolithographic IDTs

G. Boldeiu

C. Nastase

Alexandra Nicoloiu

et al.

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Resonance frequency vs. magnetic field analysis for ScA1N/Si SAW resonators with magnetostrictive metalization on the nanolithographic IDTs

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References 9 publications

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