“…Experimental Figure 1 schematically shows the layout of the apparatus for both laser-SNMS and TOF-SIMS. 17,18 The main components are an ultrahigh vacuum chamber with two low-OH-content UV grade fused quartz windows (COSMOTEC Co., Ltd.), a sample manipulator (Toyama Co., Ltd.), a liquid-metal Ga ion source (Ga-FIB) for spectroscopy and imaging (A&D Co., Ltd.), a TOF mass analyzer (Toyama Co., Ltd.) for analyzing photo-ionized species, a precision timing generator (DG535, Stanford Research Systems, USA) for synchronizing a laser with Ga-FIB, a TOF-MS, and a UV microchip laser. 18 The UV microchip laser has characteristics of a short warm-up time, being nearly maintenance free, a small laser head size (~10 × 30 × 5 cm), a small power supply (~30 × 25 × 15 cm), a high repetition rate (over 1 kHz), high power (maximum energy 80 μJ/pulse) for a wavelength of 266 nm.…”